JPS63188938U - - Google Patents

Info

Publication number
JPS63188938U
JPS63188938U JP8132087U JP8132087U JPS63188938U JP S63188938 U JPS63188938 U JP S63188938U JP 8132087 U JP8132087 U JP 8132087U JP 8132087 U JP8132087 U JP 8132087U JP S63188938 U JPS63188938 U JP S63188938U
Authority
JP
Japan
Prior art keywords
wafer
exposure apparatus
light source
shielding plate
mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8132087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8132087U priority Critical patent/JPS63188938U/ja
Publication of JPS63188938U publication Critical patent/JPS63188938U/ja
Pending legal-status Critical Current

Links

JP8132087U 1987-05-28 1987-05-28 Pending JPS63188938U (US20100268047A1-20101021-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8132087U JPS63188938U (US20100268047A1-20101021-C00003.png) 1987-05-28 1987-05-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8132087U JPS63188938U (US20100268047A1-20101021-C00003.png) 1987-05-28 1987-05-28

Publications (1)

Publication Number Publication Date
JPS63188938U true JPS63188938U (US20100268047A1-20101021-C00003.png) 1988-12-05

Family

ID=30932952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8132087U Pending JPS63188938U (US20100268047A1-20101021-C00003.png) 1987-05-28 1987-05-28

Country Status (1)

Country Link
JP (1) JPS63188938U (US20100268047A1-20101021-C00003.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02278814A (ja) * 1989-04-20 1990-11-15 Fujitsu Ltd ウエハの露光方法
JP2008258634A (ja) * 2007-04-05 2008-10-23 Asml Netherlands Bv 基板をマスクするリソグラフィ装置及び方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02278814A (ja) * 1989-04-20 1990-11-15 Fujitsu Ltd ウエハの露光方法
JP2008258634A (ja) * 2007-04-05 2008-10-23 Asml Netherlands Bv 基板をマスクするリソグラフィ装置及び方法

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