JPS63188844U - - Google Patents
Info
- Publication number
- JPS63188844U JPS63188844U JP8010987U JP8010987U JPS63188844U JP S63188844 U JPS63188844 U JP S63188844U JP 8010987 U JP8010987 U JP 8010987U JP 8010987 U JP8010987 U JP 8010987U JP S63188844 U JPS63188844 U JP S63188844U
- Authority
- JP
- Japan
- Prior art keywords
- bellows
- electrode rod
- end plate
- vacuum
- fixed electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000005300 metallic glass Substances 0.000 claims description 2
- 239000012212 insulator Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Diaphragms And Bellows (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8010987U JPS63188844U (cs) | 1987-05-27 | 1987-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8010987U JPS63188844U (cs) | 1987-05-27 | 1987-05-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63188844U true JPS63188844U (cs) | 1988-12-05 |
Family
ID=33446786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8010987U Pending JPS63188844U (cs) | 1987-05-27 | 1987-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63188844U (cs) |
-
1987
- 1987-05-27 JP JP8010987U patent/JPS63188844U/ja active Pending