JPH02132937U - - Google Patents
Info
- Publication number
- JPH02132937U JPH02132937U JP4112989U JP4112989U JPH02132937U JP H02132937 U JPH02132937 U JP H02132937U JP 4112989 U JP4112989 U JP 4112989U JP 4112989 U JP4112989 U JP 4112989U JP H02132937 U JPH02132937 U JP H02132937U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust duct
- vacuum container
- axis
- hole
- small chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4112989U JPH02132937U (cs) | 1989-04-07 | 1989-04-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4112989U JPH02132937U (cs) | 1989-04-07 | 1989-04-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02132937U true JPH02132937U (cs) | 1990-11-05 |
Family
ID=31551528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4112989U Pending JPH02132937U (cs) | 1989-04-07 | 1989-04-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02132937U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010109915A1 (ja) * | 2009-03-27 | 2010-09-30 | シャープ株式会社 | 気相成長装置及び気相成長方法 |
-
1989
- 1989-04-07 JP JP4112989U patent/JPH02132937U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010109915A1 (ja) * | 2009-03-27 | 2010-09-30 | シャープ株式会社 | 気相成長装置及び気相成長方法 |
| JP2010232402A (ja) * | 2009-03-27 | 2010-10-14 | Sharp Corp | 気相成長装置及び気相成長方法 |