JPS6318848U - - Google Patents

Info

Publication number
JPS6318848U
JPS6318848U JP11307886U JP11307886U JPS6318848U JP S6318848 U JPS6318848 U JP S6318848U JP 11307886 U JP11307886 U JP 11307886U JP 11307886 U JP11307886 U JP 11307886U JP S6318848 U JPS6318848 U JP S6318848U
Authority
JP
Japan
Prior art keywords
base
holding plate
mounting part
circuit board
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11307886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0429563Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11307886U priority Critical patent/JPH0429563Y2/ja
Publication of JPS6318848U publication Critical patent/JPS6318848U/ja
Application granted granted Critical
Publication of JPH0429563Y2 publication Critical patent/JPH0429563Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
JP11307886U 1986-07-22 1986-07-22 Expired JPH0429563Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11307886U JPH0429563Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-07-22 1986-07-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11307886U JPH0429563Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-07-22 1986-07-22

Publications (2)

Publication Number Publication Date
JPS6318848U true JPS6318848U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-02-08
JPH0429563Y2 JPH0429563Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-07-17

Family

ID=30994538

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11307886U Expired JPH0429563Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-07-22 1986-07-22

Country Status (1)

Country Link
JP (1) JPH0429563Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0429563Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-07-17

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