JPS6318842U - - Google Patents
Info
- Publication number
- JPS6318842U JPS6318842U JP11186486U JP11186486U JPS6318842U JP S6318842 U JPS6318842 U JP S6318842U JP 11186486 U JP11186486 U JP 11186486U JP 11186486 U JP11186486 U JP 11186486U JP S6318842 U JPS6318842 U JP S6318842U
- Authority
- JP
- Japan
- Prior art keywords
- support means
- view
- semiconductor wafer
- semiconductor
- wafer transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11186486U JPS6318842U (enExample) | 1986-07-21 | 1986-07-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11186486U JPS6318842U (enExample) | 1986-07-21 | 1986-07-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6318842U true JPS6318842U (enExample) | 1988-02-08 |
Family
ID=30992187
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11186486U Pending JPS6318842U (enExample) | 1986-07-21 | 1986-07-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6318842U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03212951A (ja) * | 1990-01-18 | 1991-09-18 | Tokyo Electron Sagami Ltd | 基板移載装置及び処理装置 |
| JP2010098048A (ja) * | 2008-10-15 | 2010-04-30 | Shin Etsu Handotai Co Ltd | ウェーハ移載装置及び縦型熱処理装置 |
-
1986
- 1986-07-21 JP JP11186486U patent/JPS6318842U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03212951A (ja) * | 1990-01-18 | 1991-09-18 | Tokyo Electron Sagami Ltd | 基板移載装置及び処理装置 |
| JP2010098048A (ja) * | 2008-10-15 | 2010-04-30 | Shin Etsu Handotai Co Ltd | ウェーハ移載装置及び縦型熱処理装置 |