JPS6318841U - - Google Patents
Info
- Publication number
- JPS6318841U JPS6318841U JP11203286U JP11203286U JPS6318841U JP S6318841 U JPS6318841 U JP S6318841U JP 11203286 U JP11203286 U JP 11203286U JP 11203286 U JP11203286 U JP 11203286U JP S6318841 U JPS6318841 U JP S6318841U
- Authority
- JP
- Japan
- Prior art keywords
- arm
- guide arm
- sheave
- rotation support
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Specific Conveyance Elements (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11203286U JPS6318841U (zh) | 1986-07-23 | 1986-07-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11203286U JPS6318841U (zh) | 1986-07-23 | 1986-07-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6318841U true JPS6318841U (zh) | 1988-02-08 |
Family
ID=30992520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11203286U Pending JPS6318841U (zh) | 1986-07-23 | 1986-07-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6318841U (zh) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011007753A1 (ja) * | 2009-07-14 | 2011-01-20 | キヤノンアネルバ株式会社 | 基板処理装置 |
| JP2011091430A (ja) * | 2003-10-16 | 2011-05-06 | Varian Semiconductor Equipment Associates Inc | ウエハ取扱い方法及びシステム |
-
1986
- 1986-07-23 JP JP11203286U patent/JPS6318841U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011091430A (ja) * | 2003-10-16 | 2011-05-06 | Varian Semiconductor Equipment Associates Inc | ウエハ取扱い方法及びシステム |
| WO2011007753A1 (ja) * | 2009-07-14 | 2011-01-20 | キヤノンアネルバ株式会社 | 基板処理装置 |
| US9245785B2 (en) | 2009-07-14 | 2016-01-26 | Canon Anelva Corporation | Substrate processing apparatus |