JPS6318841U - - Google Patents
Info
- Publication number
- JPS6318841U JPS6318841U JP11203286U JP11203286U JPS6318841U JP S6318841 U JPS6318841 U JP S6318841U JP 11203286 U JP11203286 U JP 11203286U JP 11203286 U JP11203286 U JP 11203286U JP S6318841 U JPS6318841 U JP S6318841U
- Authority
- JP
- Japan
- Prior art keywords
- arm
- guide arm
- sheave
- rotation support
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Specific Conveyance Elements (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Description
第１図は本考案の一実施例であるウエハ搬送装
置を示す平面図、第２図は第１図をＡ―Ａから見
た断面図である。
６……ガイドアーム、７……アーム、８……リ
ニアベアリングユニツト、９……ワイヤロープ、
１０ａ，１０ｂ……シーブ、１１……旋回用中空
軸、１２……アーム伸縮駆動軸。
FIG. 1 is a plan view showing a wafer transfer device as an embodiment of the present invention, and FIG. 2 is a cross-sectional view of FIG. 1 taken along line AA. 6... Guide arm, 7... Arm, 8... Linear bearing unit, 9... Wire rope,
10a, 10b...sheave, 11...hollow shaft for rotation, 12...arm telescopic drive shaft.
Claims (1)
に移動自在なガイドアームと、該ガイドアームの
基端を回転自在に支持する回転支持手段と、前記
ガイドアームの両端部にシーブを配し、該シーブ
を介して前記アームにワイヤロープを掛け、前記
シーブの前記回転支持側を回転させる回転駆動手
段とから成ることを特徴とするウエハ搬送装置。 An arm for supporting a wafer, a guide arm capable of moving the arm in the axial direction, a rotation support means for rotatably supporting the base end of the guide arm, sheaves arranged at both ends of the guide arm, A wafer transfer device comprising: a rotation drive means for hanging a wire rope on the arm via a sheave, and rotating the rotation support side of the sheave.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11203286U JPS6318841U (en) | 1986-07-23 | 1986-07-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11203286U JPS6318841U (en) | 1986-07-23 | 1986-07-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6318841U true JPS6318841U (en) | 1988-02-08 |
Family
ID=30992520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11203286U Pending JPS6318841U (en) | 1986-07-23 | 1986-07-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6318841U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011007753A1 (en) * | 2009-07-14 | 2011-01-20 | キヤノンアネルバ株式会社 | Substrate processing device |
| JP2011091430A (en) * | 2003-10-16 | 2011-05-06 | Varian Semiconductor Equipment Associates Inc | Wafer handler method and system |
-
1986
- 1986-07-23 JP JP11203286U patent/JPS6318841U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011091430A (en) * | 2003-10-16 | 2011-05-06 | Varian Semiconductor Equipment Associates Inc | Wafer handler method and system |
| WO2011007753A1 (en) * | 2009-07-14 | 2011-01-20 | キヤノンアネルバ株式会社 | Substrate processing device |
| US9245785B2 (en) | 2009-07-14 | 2016-01-26 | Canon Anelva Corporation | Substrate processing apparatus |