JPS6318835U - - Google Patents
Info
- Publication number
- JPS6318835U JPS6318835U JP11203686U JP11203686U JPS6318835U JP S6318835 U JPS6318835 U JP S6318835U JP 11203686 U JP11203686 U JP 11203686U JP 11203686 U JP11203686 U JP 11203686U JP S6318835 U JPS6318835 U JP S6318835U
- Authority
- JP
- Japan
- Prior art keywords
- signal
- function
- end point
- photoelectric converter
- amplify
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11203686U JPS6318835U (no) | 1986-07-23 | 1986-07-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11203686U JPS6318835U (no) | 1986-07-23 | 1986-07-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6318835U true JPS6318835U (no) | 1988-02-08 |
Family
ID=30992528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11203686U Pending JPS6318835U (no) | 1986-07-23 | 1986-07-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6318835U (no) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01241127A (ja) * | 1988-03-23 | 1989-09-26 | Hitachi Ltd | エッチング終点判定方法 |
-
1986
- 1986-07-23 JP JP11203686U patent/JPS6318835U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01241127A (ja) * | 1988-03-23 | 1989-09-26 | Hitachi Ltd | エッチング終点判定方法 |