JPS6318835U - - Google Patents
Info
- Publication number
- JPS6318835U JPS6318835U JP11203686U JP11203686U JPS6318835U JP S6318835 U JPS6318835 U JP S6318835U JP 11203686 U JP11203686 U JP 11203686U JP 11203686 U JP11203686 U JP 11203686U JP S6318835 U JPS6318835 U JP S6318835U
- Authority
- JP
- Japan
- Prior art keywords
- signal
- function
- end point
- photoelectric converter
- amplify
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Drying Of Semiconductors (AREA)
Description
第１図は本考案の構成を示す回路図、第２図は
光電変換器の信号波形を示す線図、第３図はオフ
セツトゲイン調整後の波形を示す線図である。
１……光電変換器、２……オフセツト加算器、
３……ゲイン調節器、８……マイコン、９，１０
……。
FIG. 1 is a circuit diagram showing the configuration of the present invention, FIG. 2 is a diagram showing signal waveforms of a photoelectric converter, and FIG. 3 is a diagram showing waveforms after offset gain adjustment. 1...Photoelectric converter, 2...Offset adder,
3...Gain adjuster, 8...Microcomputer, 9,10
…….
Claims (1)
検出する光電変換器と、その信号を所定のレベル
まで移動させる機能と、その移動後の信号を増巾
する機能を有する回路において、エツチング終了
前および終了後の入力を行なう手段と、終了前と
終了後の信号レベルを決定する手段を設けたこと
を特徴とする終点判定検出装置。 In a circuit that has a photoelectric converter that detects the emission intensity of ions generated by etching, a function to move the signal to a predetermined level, and a function to amplify the signal after the movement, the An end point determination and detection device characterized by comprising means for inputting information and means for determining signal levels before and after the end point.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11203686U JPS6318835U (en) | 1986-07-23 | 1986-07-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11203686U JPS6318835U (en) | 1986-07-23 | 1986-07-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6318835U true JPS6318835U (en) | 1988-02-08 |
Family
ID=30992528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11203686U Pending JPS6318835U (en) | 1986-07-23 | 1986-07-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6318835U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01241127A (en) * | 1988-03-23 | 1989-09-26 | Hitachi Ltd | Device for deciding end point of etching |
-
1986
- 1986-07-23 JP JP11203686U patent/JPS6318835U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01241127A (en) * | 1988-03-23 | 1989-09-26 | Hitachi Ltd | Device for deciding end point of etching |