JPS63187147U - - Google Patents

Info

Publication number
JPS63187147U
JPS63187147U JP1987074250U JP7425087U JPS63187147U JP S63187147 U JPS63187147 U JP S63187147U JP 1987074250 U JP1987074250 U JP 1987074250U JP 7425087 U JP7425087 U JP 7425087U JP S63187147 U JPS63187147 U JP S63187147U
Authority
JP
Japan
Prior art keywords
film
utility
electronic components
scope
registration request
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987074250U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987074250U priority Critical patent/JPS63187147U/ja
Publication of JPS63187147U publication Critical patent/JPS63187147U/ja
Pending legal-status Critical Current

Links

JP1987074250U 1987-05-18 1987-05-18 Pending JPS63187147U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987074250U JPS63187147U (OSRAM) 1987-05-18 1987-05-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987074250U JPS63187147U (OSRAM) 1987-05-18 1987-05-18

Publications (1)

Publication Number Publication Date
JPS63187147U true JPS63187147U (OSRAM) 1988-11-30

Family

ID=30919291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987074250U Pending JPS63187147U (OSRAM) 1987-05-18 1987-05-18

Country Status (1)

Country Link
JP (1) JPS63187147U (OSRAM)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5315765A (en) * 1976-07-28 1978-02-14 Hitachi Ltd Vacuum caontact prevention method of hard mask
JPS57176041A (en) * 1981-04-22 1982-10-29 Toray Ind Inc Photomask for printing circuit and exposure method using this

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5315765A (en) * 1976-07-28 1978-02-14 Hitachi Ltd Vacuum caontact prevention method of hard mask
JPS57176041A (en) * 1981-04-22 1982-10-29 Toray Ind Inc Photomask for printing circuit and exposure method using this

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