JPS6318698A - Manufacture of laminated ceramic electronic parts - Google Patents

Manufacture of laminated ceramic electronic parts

Info

Publication number
JPS6318698A
JPS6318698A JP61161951A JP16195186A JPS6318698A JP S6318698 A JPS6318698 A JP S6318698A JP 61161951 A JP61161951 A JP 61161951A JP 16195186 A JP16195186 A JP 16195186A JP S6318698 A JPS6318698 A JP S6318698A
Authority
JP
Japan
Prior art keywords
ceramic electronic
dielectric
electronic component
laminated
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61161951A
Other languages
Japanese (ja)
Inventor
俊自 野村
芳野 久士
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP61161951A priority Critical patent/JPS6318698A/en
Publication of JPS6318698A publication Critical patent/JPS6318698A/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔発明の目的〕 (産業上の利用分野) 本発明は、積1mセラミック電子部品の製造方法に関し
更に詳しくは、内部電極に4電性酸化物を用いた積層コ
ンデンサーや積層アクチーエータの製造方法に関する。
[Detailed Description of the Invention] [Objective of the Invention] (Industrial Field of Application) The present invention relates to a method for manufacturing a 1 m ceramic electronic component, and more specifically, to a multilayer capacitor using a tetraelectric oxide as an internal electrode. The present invention relates to a method for manufacturing a laminated actuator.

(従来技術) セラミック篭子部品は小「J化、高性能化の要請から積
層構造を有する部品が開発されている。この構造を有す
る部品では、電極面積が増しその材料の部品コストに占
める割合が増大している。
(Prior art) Ceramic cage parts have been developed to have a laminated structure due to the demand for small J and high performance.In parts with this structure, the electrode area increases and the ratio of the material to the part cost is reduced. is increasing.

従来より積層セラミック電子部品の製造方法は、ドクタ
ーブレード法Iこより作成した誘電体シートlこptや
Agなとの貴金属ペーストを印刷し積層して焼成すると
いう方法であった。
Conventionally, the method for manufacturing laminated ceramic electronic components has been to print dielectric sheets prepared by the doctor blade method I or noble metal pastes such as Ag, laminate them, and fire them.

また誘電体セラミックスの焼成時に蒸発昇華などにより
消失する材料を誘電体間fこ挿入し、焼成後金属鉛を含
浸させて電極を形成するという方法も行われているが、
製造プロセスが複雑となり有効ではない。
Another method is to insert a material that disappears by evaporation and sublimation during firing of dielectric ceramics into the dielectric, and then impregnate it with metallic lead after firing to form electrodes.
The manufacturing process becomes complicated and is not effective.

(発明が解決しようとする問題点) 以上述べたように、従来技術では電極材料に貴金属を用
いるため高価なものとなるばかりでなく、電極材料には
金属が用いられ、誘電体セラミックスきの熱膨張や弾性
定数の不整合1こより部品の強度が低下し、特に電極と
誘電体の界面の接合性に問題があった。
(Problems to be Solved by the Invention) As described above, in the conventional technology, noble metals are used for electrode materials, which are not only expensive, but also metals used for electrode materials, resulting in heat dissipation caused by dielectric ceramics. Due to expansion and mismatching of elastic constants, the strength of the parts decreased, and there were problems in particular with the bondability at the interface between the electrode and the dielectric.

〔発明の構成〕[Structure of the invention]

(問題点を解決するための手段と作用)本発明者らは、
上記従来技術における問題点を解消し、本発明の目的を
達成すべく絞量研究を重ねた結果電極材料に誘電体と同
一のペロブスカイト構造を持つB a P b O,系
の材料を用いること1こより良好な積層セラミック電子
部品を得ることができるとの事実を見い出し本発明の方
法を開発するに到った。
(Means and effects for solving the problem) The present inventors
In order to solve the problems in the above-mentioned conventional technology and achieve the purpose of the present invention, as a result of repeated research on the reduction amount, it was found that a B a P b O type material having the same perovskite structure as the dielectric material was used as the electrode material. The inventors discovered that it is possible to obtain better laminated ceramic electronic components using this method, and developed the method of the present invention.

即ち、本発明の製造方法はPbを陰む誘電体(P b+
 −xAx ) BOs と導電性酸化物 (Bai −uDu ) (P b、−vEv) Os
の各々をドクターブレード法によりシートとし、fR層
して同時焼成により得ることを特徴さする製造方法であ
る。
That is, the manufacturing method of the present invention uses a dielectric material containing Pb (P b+
-xAx) BOs and conductive oxide (Bai -uDu) (Pb, -vEv) Os
This manufacturing method is characterized in that each of the above is made into a sheet by a doctor blade method, an fR layer is formed, and the sheet is obtained by simultaneous firing.

発明者らは上記組成のシートを種々作成し、積層して同
時焼成を行ワた所、両者に含まれる酸化鉛の拡散や蒸発
現象が激しく生じることを見い出した。そこで誘電体と
導電体の間に酸化鉛のシートを挿入することにより、焼
成時に生じる酸化鉛の減少を補うことができる。その際
、酸化鉛のシートの厚さtが導電体シートの厚さをSと
して0.058≦t≦0.55 とすることが有効である。
The inventors have found that when various sheets having the above compositions were prepared, laminated and fired simultaneously, the diffusion and evaporation phenomena of lead oxide contained in both sheets occurred violently. Therefore, by inserting a sheet of lead oxide between the dielectric and the conductor, it is possible to compensate for the decrease in lead oxide that occurs during firing. In this case, it is effective that the thickness t of the lead oxide sheet satisfies 0.058≦t≦0.55, where S is the thickness of the conductor sheet.

ここで酸化鉛のシートの厚さが0.055よっつずいと
焼成時の酸化鉛の減少を十分に補うことがてきない。ま
た0、55より厚いと焼成後に誘電体層と導電体層の間
に酸化鉛より成る層が残存し、その特性を著しく低下さ
せる。
If the thickness of the lead oxide sheet is greater than 0.055 mm, it will not be possible to sufficiently compensate for the decrease in lead oxide during firing. If the thickness is greater than 0.55, a layer made of lead oxide will remain between the dielectric layer and the conductive layer after firing, significantly deteriorating its characteristics.

また特に、0.2S≦t≦0.4Sなる厚さを有する酸
化鉛シートを挿入することが特に有効である。
In particular, it is particularly effective to insert a lead oxide sheet having a thickness of 0.2S≦t≦0.4S.

更に焼成時の酸化鉛の減少分を誘電体及び4電体シート
中の組成を酸化鉛過剰とすることにより補うことが可能
である。
Furthermore, it is possible to compensate for the decrease in lead oxide during firing by making the composition of the dielectric and the tetraelectric sheet excessive in lead oxide.

(実施例) 実施例1 第1表4こ示ず誘電体と導電体をその組成となるよう1
こ、原料のPbO,BaC0,,5rCO,、CaC0
,。
(Example) Example 1 As shown in Table 1, the dielectric material and the conductive material were adjusted to have the same composition.
This, the raw materials PbO, BaC0,, 5rCO,, CaC0
,.

La、O,、Nd2O3、B110. 、Sb、0. 
、ZrO,、Tie、 。
La, O,, Nd2O3, B110. , Sb, 0.
,ZrO,,Tie,.

Nb、O,、MgO,SnO,、Coco、 、NiO
,WOs、Fe、0. 。
Nb, O, , MgO, SnO, , Coco, , NiO
, WOs, Fe, 0. .

Li、CO,、CeO,、ZnOを秤量調合し、ボット
ドホールを用い純水中で粉砕混合した。乾燥後誘電体は
  ℃で3時間大気中で仮焼導電体は900℃で3時間
酸素フロー中で仮焼した。これらを再びボールとポット
を用い純水中で粉砕し乾燥した。
Li, CO, CeO, and ZnO were weighed and mixed, and ground and mixed in pure water using a bottled hole. After drying, the dielectric was calcined in air at 900°C for 3 hours and the conductor was calcined in an oxygen flow for 3 hours at 900°C. These were ground again in pure water using a ball and pot and dried.

これらの粉末にバインダーさしてポリビニルブチラール
を加えドクターブレード法によりシートを作成した。こ
れらと酸化鉛シートを積層して酸素フロー中で1000
℃3時間焼成した。
A binder was added to these powders, polyvinyl butyral was added, and a sheet was prepared using a doctor blade method. These and lead oxide sheets were laminated and heated for 1000 minutes in an oxygen flow.
It was baked at ℃ for 3 hours.

第1表 焼成後のセラミック部品では、ふくれやクラックの発生
は観察されなかった。また得られた部品を3点曲げ試験
を行うな。その結果、誘導体と導電体界面で破断した部
品はなかった。
No blistering or cracking was observed in the fired ceramic parts shown in Table 1. Also, do not perform a three-point bending test on the resulting parts. As a result, no parts were broken at the interface between the dielectric and the conductor.

実施例1と同様にして、P bo4c aO,2Tio
、s F etxs O3の粉末とB a P b、O
xの粉末を作成した後、それぞれの粉末にit比で20
%のPbO粉末を加え、純水中で粉砕・混合した後乾燥
してドクターブレード法で40岬のシートを作成した。
In the same manner as in Example 1, P bo4c aO,2Tio
, s F etxs O3 powder and B a P b, O
After creating x powders, each powder has an it ratio of 20
% of PbO powder was added, the mixture was crushed and mixed in pure water, and then dried to form a sheet of 40 capes using a doctor blade method.

誘電体シートを10枚積層し、導電体シートを5積層層
して、これらを交互1こ積層して50層の積層体を作成
した。これを50℃/ h rの速度で昇温する炉中で
1000℃3時間酸素フロー中で焼成した。
Ten dielectric sheets were laminated, five conductive sheets were laminated, and these were alternately laminated to create a 50-layer laminate. This was calcined in an oxygen flow at 1000° C. for 3 hours in a furnace increasing the temperature at a rate of 50° C./hr.

その結果、界面で破断した箇所はなかった。As a result, there was no fracture at the interface.

C発明の効果〕 以上詳述したように本発明によれば、誘屯体七内部電極
の導電体の整合性のよい積層セラミック電子部品を安価
に得ることができる。
C. Effects of the Invention] As detailed above, according to the present invention, a multilayer ceramic electronic component in which the conductors of the dielectric seven internal electrodes have good matching can be obtained at low cost.

代理人弁理士  則 近 憲 佑 同    竹 花 喜久男Representative patent attorney Kensuke Chika Same Bamboo Flower Kikuo

Claims (1)

【特許請求の範囲】 (1)内部電極が導電性酸化物からなる積層セラミック
電子部品をドクターブレード法により作成した誘電体及
び導電体のシートを積層して同時焼成により得ることを
特徴とする積層セラミック電子部品の製造方法。 (2)前記誘電体が組成で (Pb_1_−_xA_x)BO_3 〔ただし、AはBa、Br、Ca、La、Nd、Bi、
Sbの群から選ばれる少なくとも1種 BはZr、Ti、Sb、Nb、Mg、Sn、Co、Ni
、W、FeTa、Yの群から選ばれる少なくとも1種 0≦x≦0.30〕 と表わされることを特徴とする特許請求の範囲第1項記
載の誘電セラミック電子部品の製造方法。 (3)前記導電体が組成で (Ba_1_−_uD_u)(Pb_1_−_vE_v
)O_3〔ただし、DはLi、La、Ceから選ばれる
少なくとも1種 BはSn、Zn、Fe、Co、Sb、Biから選ばれる
少なくとも1種 0≦u≦0.3、0≦v≦0.3〕 と表わされることを特徴とする特許請求の範囲第1項記
載の積層セラミック電子部品の製造方法。 (4)前記誘電体及び導電体のシートを積層する際に該
シート間に酸化鉛のシートを挿入することを特徴とする
特許請求の範囲第2項及び第3項記載の積層セラミック
電子部品の製造方法。 (5)前記酸化鉛のシートの厚さtが前記導電体シート
の厚さsとして 0.05s≦t≦0.55 であることを特徴とする特許請求の範囲第4項記載の積
層セラミック電子部品の製造方法。
[Scope of Claims] (1) A laminated ceramic electronic component in which the internal electrodes are made of a conductive oxide, which is obtained by laminating dielectric and conductive sheets prepared by a doctor blade method and co-firing the laminated ceramic electronic component. Method of manufacturing ceramic electronic components. (2) The composition of the dielectric is (Pb_1_-_xA_x)BO_3 [where A is Ba, Br, Ca, La, Nd, Bi,
At least one B selected from the group of Sb is Zr, Ti, Sb, Nb, Mg, Sn, Co, Ni
, W, FeTa, and Y. 0≦x≦0.30] The method for manufacturing a dielectric ceramic electronic component according to claim 1, wherein (3) The conductor has a composition of (Ba_1_-_uD_u) (Pb_1_-_vE_v
) O_3 [However, D is at least one type selected from Li, La, and Ce B is at least one type selected from Sn, Zn, Fe, Co, Sb, and Bi 0≦u≦0.3, 0≦v≦0 .3] The method for manufacturing a multilayer ceramic electronic component according to claim 1, characterized in that: (4) The multilayer ceramic electronic component according to claims 2 and 3, characterized in that a lead oxide sheet is inserted between the dielectric and conductor sheets when the sheets are laminated. Production method. (5) The multilayer ceramic electronic according to claim 4, wherein the thickness t of the lead oxide sheet is 0.05s≦t≦0.55, where the thickness s of the conductive sheet is 0.05s≦t≦0.55. How the parts are manufactured.
JP61161951A 1986-07-11 1986-07-11 Manufacture of laminated ceramic electronic parts Pending JPS6318698A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61161951A JPS6318698A (en) 1986-07-11 1986-07-11 Manufacture of laminated ceramic electronic parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61161951A JPS6318698A (en) 1986-07-11 1986-07-11 Manufacture of laminated ceramic electronic parts

Publications (1)

Publication Number Publication Date
JPS6318698A true JPS6318698A (en) 1988-01-26

Family

ID=15745151

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61161951A Pending JPS6318698A (en) 1986-07-11 1986-07-11 Manufacture of laminated ceramic electronic parts

Country Status (1)

Country Link
JP (1) JPS6318698A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10322156A (en) * 1996-06-10 1998-12-04 Fuji Electric Co Ltd Noise filter for power inverter
US7781358B2 (en) * 2008-02-15 2010-08-24 Trs Technologies, Inc. Antiferroelectric multilayer ceramic capacitor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10322156A (en) * 1996-06-10 1998-12-04 Fuji Electric Co Ltd Noise filter for power inverter
US7781358B2 (en) * 2008-02-15 2010-08-24 Trs Technologies, Inc. Antiferroelectric multilayer ceramic capacitor
US7884042B2 (en) 2008-02-15 2011-02-08 Trs Technologies, Inc. Antiferroelectric multilayer ceramic capacitor

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