JPS63186764U - - Google Patents
Info
- Publication number
- JPS63186764U JPS63186764U JP7665987U JP7665987U JPS63186764U JP S63186764 U JPS63186764 U JP S63186764U JP 7665987 U JP7665987 U JP 7665987U JP 7665987 U JP7665987 U JP 7665987U JP S63186764 U JPS63186764 U JP S63186764U
- Authority
- JP
- Japan
- Prior art keywords
- pellet
- vapor deposition
- vapor
- deposition
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 claims description 13
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7665987U JPS63186764U (enExample) | 1987-05-21 | 1987-05-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7665987U JPS63186764U (enExample) | 1987-05-21 | 1987-05-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63186764U true JPS63186764U (enExample) | 1988-11-30 |
Family
ID=30923946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7665987U Pending JPS63186764U (enExample) | 1987-05-21 | 1987-05-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63186764U (enExample) |
-
1987
- 1987-05-21 JP JP7665987U patent/JPS63186764U/ja active Pending