JPS63186420A - 二重槽型気相成長装置 - Google Patents

二重槽型気相成長装置

Info

Publication number
JPS63186420A
JPS63186420A JP1799887A JP1799887A JPS63186420A JP S63186420 A JPS63186420 A JP S63186420A JP 1799887 A JP1799887 A JP 1799887A JP 1799887 A JP1799887 A JP 1799887A JP S63186420 A JPS63186420 A JP S63186420A
Authority
JP
Japan
Prior art keywords
reaction
tank
reaction tank
chamber
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1799887A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0517695B2 (enExample
Inventor
Koichi Nakagawa
幸一 中川
Kenji Koyama
小山　堅二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1799887A priority Critical patent/JPS63186420A/ja
Publication of JPS63186420A publication Critical patent/JPS63186420A/ja
Publication of JPH0517695B2 publication Critical patent/JPH0517695B2/ja
Granted legal-status Critical Current

Links

JP1799887A 1987-01-28 1987-01-28 二重槽型気相成長装置 Granted JPS63186420A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1799887A JPS63186420A (ja) 1987-01-28 1987-01-28 二重槽型気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1799887A JPS63186420A (ja) 1987-01-28 1987-01-28 二重槽型気相成長装置

Publications (2)

Publication Number Publication Date
JPS63186420A true JPS63186420A (ja) 1988-08-02
JPH0517695B2 JPH0517695B2 (enExample) 1993-03-09

Family

ID=11959386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1799887A Granted JPS63186420A (ja) 1987-01-28 1987-01-28 二重槽型気相成長装置

Country Status (1)

Country Link
JP (1) JPS63186420A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5342412A (en) * 1991-02-25 1994-08-30 Kiribai Chemical Industry Co., Ltd. Disposable body warmer

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3033617U (ja) * 1996-07-16 1997-01-28 株式会社はくぶん オルゴールケース及びこれを収納したオルゴール箱

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5342412A (en) * 1991-02-25 1994-08-30 Kiribai Chemical Industry Co., Ltd. Disposable body warmer

Also Published As

Publication number Publication date
JPH0517695B2 (enExample) 1993-03-09

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees