JPS63185077U - - Google Patents

Info

Publication number
JPS63185077U
JPS63185077U JP7599387U JP7599387U JPS63185077U JP S63185077 U JPS63185077 U JP S63185077U JP 7599387 U JP7599387 U JP 7599387U JP 7599387 U JP7599387 U JP 7599387U JP S63185077 U JPS63185077 U JP S63185077U
Authority
JP
Japan
Prior art keywords
sample
liquid
vacuum processing
vacuum
cooling mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7599387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7599387U priority Critical patent/JPS63185077U/ja
Publication of JPS63185077U publication Critical patent/JPS63185077U/ja
Pending legal-status Critical Current

Links

JP7599387U 1987-05-22 1987-05-22 Pending JPS63185077U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7599387U JPS63185077U (enrdf_load_stackoverflow) 1987-05-22 1987-05-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7599387U JPS63185077U (enrdf_load_stackoverflow) 1987-05-22 1987-05-22

Publications (1)

Publication Number Publication Date
JPS63185077U true JPS63185077U (enrdf_load_stackoverflow) 1988-11-28

Family

ID=30922658

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7599387U Pending JPS63185077U (enrdf_load_stackoverflow) 1987-05-22 1987-05-22

Country Status (1)

Country Link
JP (1) JPS63185077U (enrdf_load_stackoverflow)

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