JPS63183545U - - Google Patents

Info

Publication number
JPS63183545U
JPS63183545U JP7394287U JP7394287U JPS63183545U JP S63183545 U JPS63183545 U JP S63183545U JP 7394287 U JP7394287 U JP 7394287U JP 7394287 U JP7394287 U JP 7394287U JP S63183545 U JPS63183545 U JP S63183545U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
element formation
appearance inspection
formation surface
holds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7394287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7394287U priority Critical patent/JPS63183545U/ja
Publication of JPS63183545U publication Critical patent/JPS63183545U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP7394287U 1987-05-18 1987-05-18 Pending JPS63183545U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7394287U JPS63183545U (enrdf_load_stackoverflow) 1987-05-18 1987-05-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7394287U JPS63183545U (enrdf_load_stackoverflow) 1987-05-18 1987-05-18

Publications (1)

Publication Number Publication Date
JPS63183545U true JPS63183545U (enrdf_load_stackoverflow) 1988-11-25

Family

ID=30918721

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7394287U Pending JPS63183545U (enrdf_load_stackoverflow) 1987-05-18 1987-05-18

Country Status (1)

Country Link
JP (1) JPS63183545U (enrdf_load_stackoverflow)

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