JPS63183275U - - Google Patents
Info
- Publication number
- JPS63183275U JPS63183275U JP7475287U JP7475287U JPS63183275U JP S63183275 U JPS63183275 U JP S63183275U JP 7475287 U JP7475287 U JP 7475287U JP 7475287 U JP7475287 U JP 7475287U JP S63183275 U JPS63183275 U JP S63183275U
- Authority
- JP
- Japan
- Prior art keywords
- liquid phase
- phase epitaxial
- epitaxial growth
- chamber
- jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007791 liquid phase Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7475287U JPS63183275U (enExample) | 1987-05-19 | 1987-05-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7475287U JPS63183275U (enExample) | 1987-05-19 | 1987-05-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63183275U true JPS63183275U (enExample) | 1988-11-25 |
Family
ID=30920260
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7475287U Pending JPS63183275U (enExample) | 1987-05-19 | 1987-05-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63183275U (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6051695A (ja) * | 1983-08-29 | 1985-03-23 | Hitachi Cable Ltd | 液相エピタキシャル結晶成長方法とその装置 |
| JPS6131385A (ja) * | 1984-07-23 | 1986-02-13 | Showa Denko Kk | 液相エピタキシヤル成長方法 |
-
1987
- 1987-05-19 JP JP7475287U patent/JPS63183275U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6051695A (ja) * | 1983-08-29 | 1985-03-23 | Hitachi Cable Ltd | 液相エピタキシャル結晶成長方法とその装置 |
| JPS6131385A (ja) * | 1984-07-23 | 1986-02-13 | Showa Denko Kk | 液相エピタキシヤル成長方法 |