JPS63182535U - - Google Patents
Info
- Publication number
- JPS63182535U JPS63182535U JP7393787U JP7393787U JPS63182535U JP S63182535 U JPS63182535 U JP S63182535U JP 7393787 U JP7393787 U JP 7393787U JP 7393787 U JP7393787 U JP 7393787U JP S63182535 U JPS63182535 U JP S63182535U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holding part
- wafers
- detection section
- inclination
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 11
- 238000001514 detection method Methods 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7393787U JPS63182535U (sl) | 1987-05-18 | 1987-05-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7393787U JPS63182535U (sl) | 1987-05-18 | 1987-05-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63182535U true JPS63182535U (sl) | 1988-11-24 |
Family
ID=30918711
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7393787U Pending JPS63182535U (sl) | 1987-05-18 | 1987-05-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63182535U (sl) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007329256A (ja) * | 2006-06-07 | 2007-12-20 | Nec Electronics Corp | 薄板材の搬送装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60252535A (ja) * | 1984-05-30 | 1985-12-13 | Fujitsu Ltd | 基板搬送装置 |
-
1987
- 1987-05-18 JP JP7393787U patent/JPS63182535U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60252535A (ja) * | 1984-05-30 | 1985-12-13 | Fujitsu Ltd | 基板搬送装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007329256A (ja) * | 2006-06-07 | 2007-12-20 | Nec Electronics Corp | 薄板材の搬送装置 |
JP4627515B2 (ja) * | 2006-06-07 | 2011-02-09 | ルネサスエレクトロニクス株式会社 | 薄板材の搬送装置 |