JPS63182527U - - Google Patents
Info
- Publication number
- JPS63182527U JPS63182527U JP7329187U JP7329187U JPS63182527U JP S63182527 U JPS63182527 U JP S63182527U JP 7329187 U JP7329187 U JP 7329187U JP 7329187 U JP7329187 U JP 7329187U JP S63182527 U JPS63182527 U JP S63182527U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- stage group
- group
- parallel
- electrode connected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000005530 etching Methods 0.000 description 2
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7329187U JPS63182527U (es) | 1987-05-15 | 1987-05-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7329187U JPS63182527U (es) | 1987-05-15 | 1987-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63182527U true JPS63182527U (es) | 1988-11-24 |
Family
ID=30917496
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7329187U Pending JPS63182527U (es) | 1987-05-15 | 1987-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63182527U (es) |
-
1987
- 1987-05-15 JP JP7329187U patent/JPS63182527U/ja active Pending
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