JPS63181950U - - Google Patents
Info
- Publication number
- JPS63181950U JPS63181950U JP7248987U JP7248987U JPS63181950U JP S63181950 U JPS63181950 U JP S63181950U JP 7248987 U JP7248987 U JP 7248987U JP 7248987 U JP7248987 U JP 7248987U JP S63181950 U JPS63181950 U JP S63181950U
- Authority
- JP
- Japan
- Prior art keywords
- rotating mirror
- inspected
- defect inspection
- inspection device
- reflected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 4
- 230000007547 defect Effects 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7248987U JPS63181950U (en, 2012) | 1987-05-15 | 1987-05-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7248987U JPS63181950U (en, 2012) | 1987-05-15 | 1987-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63181950U true JPS63181950U (en, 2012) | 1988-11-24 |
Family
ID=30915980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7248987U Pending JPS63181950U (en, 2012) | 1987-05-15 | 1987-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63181950U (en, 2012) |
-
1987
- 1987-05-15 JP JP7248987U patent/JPS63181950U/ja active Pending