JPS63181950U - - Google Patents

Info

Publication number
JPS63181950U
JPS63181950U JP7248987U JP7248987U JPS63181950U JP S63181950 U JPS63181950 U JP S63181950U JP 7248987 U JP7248987 U JP 7248987U JP 7248987 U JP7248987 U JP 7248987U JP S63181950 U JPS63181950 U JP S63181950U
Authority
JP
Japan
Prior art keywords
rotating mirror
inspected
defect inspection
inspection device
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7248987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7248987U priority Critical patent/JPS63181950U/ja
Publication of JPS63181950U publication Critical patent/JPS63181950U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP7248987U 1987-05-15 1987-05-15 Pending JPS63181950U (US07709020-20100504-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7248987U JPS63181950U (US07709020-20100504-C00041.png) 1987-05-15 1987-05-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7248987U JPS63181950U (US07709020-20100504-C00041.png) 1987-05-15 1987-05-15

Publications (1)

Publication Number Publication Date
JPS63181950U true JPS63181950U (US07709020-20100504-C00041.png) 1988-11-24

Family

ID=30915980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7248987U Pending JPS63181950U (US07709020-20100504-C00041.png) 1987-05-15 1987-05-15

Country Status (1)

Country Link
JP (1) JPS63181950U (US07709020-20100504-C00041.png)

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