JPS63181661A - Linear stepping motor - Google Patents
Linear stepping motorInfo
- Publication number
- JPS63181661A JPS63181661A JP1355887A JP1355887A JPS63181661A JP S63181661 A JPS63181661 A JP S63181661A JP 1355887 A JP1355887 A JP 1355887A JP 1355887 A JP1355887 A JP 1355887A JP S63181661 A JPS63181661 A JP S63181661A
- Authority
- JP
- Japan
- Prior art keywords
- yoke
- teeth
- plate
- stepping motor
- pectinated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims abstract description 15
- 238000003825 pressing Methods 0.000 claims abstract description 8
- 238000010438 heat treatment Methods 0.000 claims abstract description 5
- 244000126211 Hericium coralloides Species 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 238000005530 etching Methods 0.000 abstract description 7
- 229910000976 Electrical steel Inorganic materials 0.000 abstract description 4
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 abstract description 4
- 238000003754 machining Methods 0.000 description 6
- 230000005284 excitation Effects 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 231100000989 no adverse effect Toxicity 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Linear Motors (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はリニアステッピングモータに関し、特に加工精
度を向上した小型のリニアステッピングモータに関する
。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a linear stepping motor, and particularly to a small linear stepping motor with improved processing accuracy.
第３図は従来のリニアステッピングモータにおけるヨー
ク部の一例を示す斜視図である。FIG. 3 is a perspective view showing an example of a yoke portion in a conventional linear stepping motor.
従来、この種の小型のリニアステッピングモータは、そ
の励磁コイルを有するヨークの先端の歯の形成は砥石に
よる力Ｕ工で行っておシ、このヨークの先端の歯と対向
するくし歯状のベースはハーフエツチングにより形成し
ていたが、これらの方法によると、加工精度はそれぞれ
について±２０１ｍであった。しかしながら、装置の小
型化が進むと小型リニアステッピングモータの位置決め
精度はさらに高精度なものが要求され、従来の方法では
満足できなくなっていた。Conventionally, in this type of small linear stepping motor, the teeth at the tip of the yoke containing the excitation coil were formed by force machining using a grindstone, and the teeth at the tip of the yoke were formed by a comb-shaped base that opposed the teeth at the tip of the yoke. were formed by half etching, but according to these methods, the processing accuracy was ±201 m for each method. However, as devices become more compact, the positioning accuracy of small linear stepping motors is required to be even higher, and conventional methods are no longer able to satisfy this requirement.
一万、第３図に示すように、励磁コイルを有するヨーク
１１の先端の出金、ワイヤ放電力ロエや機械加工によっ
て形成した場合、その加工精度は１０数、ｔｍであった
。As shown in FIG. 3, when the tip of the yoke 11 having the excitation coil was formed by drawing, wire discharge force Roe or machining, the processing accuracy was about 10 tm.
上述した従来のリニアステッピングモータは、ハーフエ
プチングにょシ形成したくし歯状のベースの加工精度が
±２０ またワイヤ放電加工等μｍ１
によるヨークの歯の加工精度がｌｏ数。ｍであるので、
位置決め精度として±１０．ｍ以下全必要とする高精度
のリニアステッピングモータとして防用に供することが
できないという欠点がある。In the conventional linear stepping motor described above, the machining accuracy of the comb-like base formed by half-epching is ±20 μm1, and the machining accuracy of the teeth of the yoke by wire electric discharge machining etc. is lo number. Since m,
Positioning accuracy is ±10. The drawback is that it cannot be used for defense purposes as a high-precision linear stepping motor that requires less than m.
本発明の目的は上記欠点を無くし、位置決め精度の艮好
な小型のリニアステッピングモータを提供することにあ
る。SUMMARY OF THE INVENTION An object of the present invention is to eliminate the above-mentioned drawbacks and provide a small linear stepping motor with excellent positioning accuracy.
本発明のリニアステッピングモータは、永久磁石を挾持
したヨークの歯と微小の空隙をもって対向するくし歯状
薄板と、このくし歯状薄板にベースを重ねて成シ、前記
くし歯状薄板と前記ベースは上側押圧板と下側押圧板と
の間に挾持され加熱。The linear stepping motor of the present invention is made up of a comb-tooth thin plate facing the teeth of a yoke holding a permanent magnet with a small gap, and a base superimposed on the comb-tooth thin plate, and the comb-tooth thin plate and the base. is sandwiched between the upper and lower pressing plates and heated.
力Ｕ圧による拡散接合によって一体化されてなシ、且つ
前記ヨークはその歯厚に相当するヨーク板、ヨークブロ
ックおよび金属薄膜を形成した永久磁特徴とする。The yoke is not integrated by diffusion bonding using a force U pressure, and the yoke has a permanent magnetic feature in which a yoke plate, a yoke block, and a thin metal film are formed corresponding to the tooth thickness of the yoke.
本発明はくし歯状薄板をフルエツチングで形成すること
により、その形状精度を高めることが可能でる多、また
ベースとは拡散接合にょシ確実に接合して一体化される
ため磁力への悪影響はない。In the present invention, by forming the comb-shaped thin plate by full etching, it is possible to improve the shape accuracy.Also, since it is reliably joined to the base by diffusion bonding and is integrated, there is no adverse effect on magnetic force. .
さらにヨークにおいても同様であシ、ヨーク板の歯厚精
度を極めて高精度に且つ簡単にコントロールすることが
でき、これら予め精度が得られているヨーク板等全重ね
合わせ、拡散接合することに □より、高精度を確保す
ると共に、一体化による磁力への悪影響は前記同様にな
い。Furthermore, the same goes for the yoke; the tooth thickness accuracy of the yoke plate can be controlled with extremely high precision and easily, and all of these yoke plates, etc., which have already been achieved accuracy, can be superimposed and diffusion bonded.□ As a result, high accuracy is ensured, and the integration does not have an adverse effect on the magnetic force as described above.
以下、本発明について図面を参照して詳細に説明する。 Hereinafter, the present invention will be explained in detail with reference to the drawings.
第１図（ａ） 、 （ｂｌ 、 （ｃｌは本発明の一実
施例の分解斜視図、第２図は本実施例の拡散接合を行う
熱圧着治具の斜視図である。FIG. 1(a), (bl, (cl) is an exploded perspective view of one embodiment of the present invention, and FIG. 2 is a perspective view of a thermocompression bonding jig for performing diffusion bonding of the present embodiment.
本実施例はヨーク１、ヨーク板２、ヨークブロック３、
永久磁石４、励磁コイル５、くし歯状薄板６、くし歯７
及びベース８を有してなり、また本実施例の拡散接合に
際して上側押圧板９及び下側押圧板９′を用いる。This embodiment includes a yoke 1, a yoke plate 2, a yoke block 3,
Permanent magnet 4, excitation coil 5, comb tooth-like thin plate 6, comb tooth 7
and a base 8, and an upper pressing plate 9 and a lower pressing plate 9' are used during diffusion bonding in this embodiment.
ヨーク板２は所望の板厚、例えば０．２５４ｍｍ （４
００Ｔｒａｃｋ／Ｉｎｃｈ、以下ＴＰＩ、の場合）又は
０．１２７ｍｍ（８００ＴＰＩの場合）に圧延もシくハ
研削等によって形成される。ヨーク板２同志およびヨー
クブロック３（鉄またはけい素偶等）の拡散接合は容易
であるが、永久磁石４との接合（・ま難しいので、予め
金属薄膜全コーティング（イオンプレーテング、蒸着、
メタライジング等）することによって接合全可能になら
しめている。The yoke plate 2 has a desired thickness, for example, 0.254 mm (4
00 Track/Inch (hereinafter referred to as TPI) or 0.127 mm (in the case of 800 TPI) by rolling or grinding. Diffusion bonding between the yoke plates 2 and the yoke block 3 (iron, silicon, etc.) is easy, but bonding with the permanent magnet 4 is difficult, so it is necessary to coat the entire thin metal film (ion plating, vapor deposition, etc.) in advance.
(metallizing, etc.) makes it possible to fully bond them.
上述の如く、第１図（ａｌに示すヨーク１は永久磁石４
を中央に配置し、所望の順序で一体接合される。拡散接
合に際しては加圧力２〜４Ｋｇ／ｍｍ２、加熱温度４０
０〜７００°α加熱時間１〜２時間、１Ｏ−６ｔＯｒｒ
の接合条件によって接合する。これによりヨークｌの歯
のピッチ精度全数、ｔｍＶＣ確保することができる。As mentioned above, the yoke 1 shown in FIG.
are placed in the center and integrally joined in the desired order. For diffusion bonding, apply pressure 2 to 4 Kg/mm2 and heating temperature 40
0-700°α heating time 1-2 hours, 1O-6tOrr
Weld under the following joining conditions. This makes it possible to ensure the pitch accuracy of all the teeth of the yoke l, tmVC.
）・、
第１図（ｂ）に示す励磁コイル５はヨーク１の歯の部分
に挿入される。また第１図（Ｃ１に示すくし歯状薄板６
は数１０１ｍのけい素鋼板にくし歯７をフルエツチング
で加工したものである。この＜シ歯状薄板６をフルエツ
チングで刀日工することにょシ、くし歯７の加工梢度全
±１０１ｍ以下に形成することができる。ベース８はく
し歯状薄板６′ｔ−重ね合わせて拡散接合することにょ
シ、一体化するものである。). The excitation coil 5 shown in FIG. 1(b) is inserted into the toothed portion of the yoke 1. In addition, the comb-shaped thin plate 6 shown in FIG. 1 (C1)
This is a silicon steel plate several 101 meters long with comb teeth 7 processed by full etching. By subjecting this tooth-like thin plate 6 to full-etching, it is possible to form the comb teeth 7 with a total machining depth of ±101 m or less. The base 8 is formed by overlapping and diffusion bonding the comb-shaped thin plates 6't.
拡散接合を行うに当っては、くし歯状薄板６とベース８
全位置決め後、第２図に示すように、上下から熱圧着用
の上側押圧板９および下側押圧板９′で挾持し、前述し
たヨーク部の接合時と同じ接合条件で拡散接合すること
ができる。When performing diffusion bonding, the comb-shaped thin plate 6 and the base 8
After all the positions have been determined, as shown in Fig. 2, the parts are sandwiched from above and below by the upper pressing plate 9 and the lower pressing plate 9' for thermocompression, and diffusion bonding can be performed under the same bonding conditions as when bonding the yoke portions described above. can.
以上説明したように本発明は、＜シ歯状薄板でａｌｏ、
、ｍ厚さのけい素鋼板にくし歯をフルエツチングで加工
することによシ、加工精度を±１ｏＩｉ□以下に形成す
ることができ、またヨーク部についても谷構成要素を拡
散接合して一体化することに−１、
一６一
より、極めて微細なピッチを得ることができるため、結
果としてリニアパルスモータ−の位置決め精度全土１０
．、ｍ以下にすることができる効果がある。As explained above, the present invention provides
By fully etching the comb teeth on a m-thick silicon steel plate, it is possible to form the comb teeth with a processing accuracy of ±1oIi□ or less, and the yoke part is also integrated by diffusion bonding the valley components. Since it is possible to obtain an extremely fine pitch, the overall positioning accuracy of the linear pulse motor is 10%.
．． , m or less.
第１図（ａ） 、 （ｂ） 、 （Ｃ）は本発明の一実
施例の分解斜視図、第２図は不実施例の拡散接合を行う
熱圧着治具の斜視図、第３図は従来のリニアステッピン
グモータにおけるヨーク部の一例を示す斜視図である。
１．１１・・・・・・ヨーク、２・・・・・ヨーク板、
３・・・・・・ヨークブロック、４．１２・・・・・永
久磁石、５・・・・・・励磁コイル、６・・・・・・く
し歯状薄板、７・・・・・・＜シ歯、８・・・・・・ベ
ース、９・・・・・・上側抑圧板、９′・・・・・・下
側纂２
箭 １ 回
３王ググｄワク
ｗ月
ビ」Figures 1 (a), (b), and (C) are exploded perspective views of an embodiment of the present invention, Figure 2 is a perspective view of a thermocompression jig for performing diffusion bonding in a non-embodiment, and Figure 3 is an exploded perspective view of an embodiment of the present invention. FIG. 2 is a perspective view showing an example of a yoke portion in a conventional linear stepping motor. 1.11...Yoke, 2...Yoke plate,
3...Yoke block, 4.12...Permanent magnet, 5...Exciting coil, 6...Comb-shaped thin plate, 7... <Shitooth, 8...Base, 9...Upper suppression plate, 9'...Lower string 2 箭 1 times 3 King Gugu d Waku w Moon Bi''
Claims (1)
向するくし歯状薄板と、このくし歯状薄板にベースを重
ねて成るリニアステッピングモータにおいて、前記くし
歯状薄板と前記ベースは上側押圧板と下側押圧板との間
に挾持され加熱、加圧による拡散接合によって一体化さ
れてなり、且つ前記ヨークはその歯厚に相当するヨーク
板、ヨークブロックおよび金属薄膜を形成した永久磁石
のそれぞれを拡散接合して一体化されてなることを特徴
とするリニアステッピングモータ。In a linear stepping motor comprising a comb-tooth thin plate facing the teeth of a yoke holding a permanent magnet with a small gap, and a base stacked on the comb-tooth thin plate, the comb-tooth thin plate and the base serve as an upper pressing plate. The yoke is sandwiched between the lower pressing plate and integrated by diffusion bonding by heating and pressurizing, and the yoke has a yoke plate, a yoke block, and a permanent magnet formed with a thin metal film each corresponding to the tooth thickness of the yoke. A linear stepping motor characterized by being integrated by diffusion bonding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1355887A JPS63181661A (en) | 1987-01-22 | 1987-01-22 | Linear stepping motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1355887A JPS63181661A (en) | 1987-01-22 | 1987-01-22 | Linear stepping motor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63181661A true JPS63181661A (en) | 1988-07-26 |
Family
ID=11836505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1355887A Pending JPS63181661A (en) | 1987-01-22 | 1987-01-22 | Linear stepping motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63181661A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999043073A1 (en) * | 1998-02-20 | 1999-08-26 | Northern Magnetics, Inc. | Linear stepper motor |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60241768A (en) * | 1984-05-15 | 1985-11-30 | Shinko Electric Co Ltd | Linear pulse motor |
-
1987
- 1987-01-22 JP JP1355887A patent/JPS63181661A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60241768A (en) * | 1984-05-15 | 1985-11-30 | Shinko Electric Co Ltd | Linear pulse motor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999043073A1 (en) * | 1998-02-20 | 1999-08-26 | Northern Magnetics, Inc. | Linear stepper motor |
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