JPS63179510U - - Google Patents
Info
- Publication number
- JPS63179510U JPS63179510U JP6816587U JP6816587U JPS63179510U JP S63179510 U JPS63179510 U JP S63179510U JP 6816587 U JP6816587 U JP 6816587U JP 6816587 U JP6816587 U JP 6816587U JP S63179510 U JPS63179510 U JP S63179510U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- control section
- laser interferometer
- stop position
- data memory
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000005286 illumination Methods 0.000 description 1
Landscapes
- Control Of Position Or Direction (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6816587U JPS63179510U (th) | 1987-05-06 | 1987-05-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6816587U JPS63179510U (th) | 1987-05-06 | 1987-05-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63179510U true JPS63179510U (th) | 1988-11-21 |
Family
ID=30907730
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6816587U Pending JPS63179510U (th) | 1987-05-06 | 1987-05-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63179510U (th) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60140408A (ja) * | 1983-12-28 | 1985-07-25 | Hitachi Ltd | 外観検査装置 |
-
1987
- 1987-05-06 JP JP6816587U patent/JPS63179510U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60140408A (ja) * | 1983-12-28 | 1985-07-25 | Hitachi Ltd | 外観検査装置 |
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