JPS63179235A - Crystal oscillation type moisture meter - Google Patents

Abstract

PURPOSE:To perform continuous measurement through easy operation and to check the dehumidifying ability of a dehumidifying means by providing two dehumidifying means which have a dehumidifying ability recovering function in parallel and using one of the dehumidifying means selectively. CONSTITUTION:When the dehumidifying ability of a dehumidifying means 12 is sufficient and the dehumidifying ability of a dehumidifying means 13 deteriorates, a sample gas is introduced through a sample gas intake 9 and the sample gas which is put in a dehumidified state by passing through the means 12 is supplied to a measuring means 4 by a flow dividing valve 17. Part of the sample gas, on the other hand, is diverted to a by-pass 19 by the flow dividing valve 17 to flow a capillary 18, a three-way valve 15, and the means 13, whose dehumidifying ability recovering means 21 is put in operation to heat the dehumidifying agent of the means 13. Water adsorbed to the dehumidifying agent of the means 13 is absorbed by the gas in the dry state, carried out through a three-way valve 11 and a disposal opening 22, and discarded. Then the dehumidifying agent of the means 13 is dewatered and dried, and the dehumidifying ability of the means 13 recovers.

Description

DETAILED DESCRIPTION OF THE INVENTION (a) Industrial Application Field The present invention relates to a crystal oscillation type moisture meter, and particularly relates to restoring the dehumidifying ability of a dehumidifying means in a dry channel.

(B) Prior art As shown in FIG. 5, the conventional crystal oscillation type moisture meter Ma has a flow rate regulator 2 which is a flow rate regulating means from a sample gas inlet 1a.
Wet flow path (arrow Aa force direction,
and a dry flow path (in the direction of arrow 3a) that extends from the sample gas inlet 9a to the measuring means 4a via a dehumidifying means 12a, a flow rate regulator 16a serving as a flow rate adjusting means, and a flow dividing valve 17a.

(c) Problems to be solved by the invention The crystal oscillation type moisture meter Ma is designed to cause a sample gas to flow alternately into a wet channel and a dry channel at a constant cycle, and to reduce the frequency of the crystal in the measuring means 4a that occurs at that time. The water concentration in the sample gas is measured by the difference.

As the crystal oscillation type moisture meter Ma is used, the dehumidifying ability of the dehumidifying means 12a in the dry channel decreases. Dehumidification means 12a
When the dehumidifying ability of the dehumidifying means 12a has decreased, the dehumidifying means 12a whose dehumidifying ability has decreased is replaced with a dehumidifying means having a high dehumidifying ability, or the dehumidifying agent in the dehumidifying means 12a is replaced with a dehumidifying agent having sufficient dehumidifying ability. and use it. However, in any case, the sample gas cannot be allowed to flow through the dry flow path while the dehumidifying ability is restored, and therefore there is a problem in that a so-called missing measurement state occurs in which continuous measurements cannot be made.

Furthermore, replacing the dehumidifying means 12a or replacing the dehumidifying agent in the dehumidifying means 12a in order to restore the dehumidifying ability is troublesome;
There was a problem that handling was complicated.

Furthermore, if the dehumidifying ability of the dehumidifying means 12a decreases, the measurement results become unreliable, but there is a problem in that the crystal oscillation type moisture meter Ma cannot check the dehumidifying ability of the dehumidifying means 12a.

The present invention has been made in view of the above-mentioned circumstances, and it is an object of the present invention to provide a crystal oscillation type moisture meter that allows continuous measurement with simple operation and also allows checking of the dehumidifying ability of the dehumidifying means.

(d) Means for solving the problem The present invention is a crystal oscillation type moisture meter that is equipped with two dehumidifying means having a dehumidifying capacity recovery function in parallel, and selectively uses one of the dehumidifying means. .

Its detailed configuration consists of a wet flow path through which the sample gas can pass from the first sample gas inlet, through the first flow rate adjustment means, and to the measurement means with a built-in crystal humidity sensor; an inlet, first and second three-way valves connected to the second sample gas inlet, a dehumidifier and a dehumidifying capacity recovery means for the dehumidifier, each connected to the first and second three-way valves; a second flow rate adjusting means provided with a flow dividing valve interposed between and connected between the first and second dehumidifying means and the measuring means; is introduced from the second sample gas inlet, and flows to the measuring means via the first three-way valve, the first dehumidifying means, and the second flow rate adjusting means by controlling each three-way valve and the branch valve, If desired, a part of the sample gas can be passed through the second dehumidifying means and the second three-way valve to the outside to restore the dehumidifying ability of the second dehumidifying means, and each of the three-way valves and the diversion valve can be controlled. and the second three-way valve,
The sample gas is passed through the second dehumidifying means and the second flow rate adjusting means to the measuring means, and if desired, part of the sample gas is allowed to flow outside through the first dehumidifying means and the first three-way valve. This is a crystal oscillation type moisture meter comprising a dry channel configured to restore the dehumidifying ability of one dehumidifying means.

(E) Function When using one of the dehumidifying means to form a dehumidifying channel, it is possible to recover the dehumidifying ability of the other dehumidifying means.

By comparing the dehumidifying means with the dehumidifying means whose dehumidifying ability has been restored, the dehumidifying ability of the other dehumidifying means can be checked.

(f) Examples This invention will be described in detail based on the examples shown in FIGS. 1 to 4, but the invention is not limited thereby.

The crystal oscillation type moisture meter M includes a wet channel and a dry channel through which a sample gas passes.

The wet flow path is a flow path in which the sample gas travels from the sample gas inlet 1 to the measurement means 4 via the flow rate regulator 2, which is a flow rate adjustment means, and the flow dividing valve 3 (in the six directions of arrows). Diversion valve 3
is for discarding part of the sample gas. 5 and 6 are a capillary and a sample gas waste port, respectively. The measuring means 4 has a built-in crystal type humidity sensor (not shown), and calculates and displays the amount of water in the sample gas based on the vibration frequency measured by the humidity sensor.

7 and 8 are a flow meter and a sample gas waste port, respectively.

The dry channel includes a sample gas inlet 9, a three-way valve 10.11 connected to the sample gas inlet 9, and a three-way valve 10.11 connected to the sample gas inlet 9.
11 respectively connected to the dehumidifying means 12.13 and three-way valves 14.15 respectively connected to the dehumidifying means 12.13.
, the three-way valve 14 , 15 and the measuring means 4 are interposed and connected to each other, and are equipped with a flow rate adjusting means consisting of a flow rate regulator 16 and a dividing valve 17 and a capillary 18 . 15 and a bypass path 19 connecting the two. The three-way valves 10, 11, 14, and 15 are of electromagnetic type. The dehumidifying means 12.13 each contain a dehumidifying agent (
(not shown) and a dehumidifying ability recovery means 20.21 for restoring the ability of the dehumidifying agent. The dehumidifier is synthetic hydrochloride (molecular sieve), and dehumidification ability recovery means 2
1.21 is a heater.

As shown in the direction of arrow B in FIG.
．． 11.14.15 and the diverter valve 17 to flow the water to the three-way valve 10, the dehumidifying means 12, the three-way valve 14, the flow regulator 16, the diverting valve 17, and the measuring means 4, and if desired pass through the dehumidifying means 12. A part of the sample gas that has been collected is diverted from the flow dividing valve 17 to the bypass 19, and is configured to flow through the capillary 18, the three-way valve 15, the dehumidification means 13, and the three-way valve 11, and then flow to the outside from the exhaust port 22. There is. Therefore, the dehumidifying means 12
When the dehumidifying ability of the dehumidifying means 13 is sufficient and the dehumidifying ability of the dehumidifying means 13 has decreased, the sample gas is introduced from the sample gas inlet 9 and passed through the dehumidifying means 12 to dehumidify and dry the sample. The gas is allowed to flow to the measuring means 4 through the diverter valve 17. In addition, a part of the sample gas in the dehumidified dry state is diverted from the flow dividing valve 17 to one bypass, and then flows to the capillary 18, the three-way valve 15, and the dehumidifying means 13, and at this time, the dehumidifying ability recovery means 21 of the dehumidifying means 13 The dehumidifying means 13 is activated by activating the heater.
Heat the dehumidifier to 350°C. Here, the dehumidifying means 13
The moisture adsorbed by the dehumidifying agent is absorbed by the dehumidified and dry sample gas that has been sent, and is carried to the outside through the three-way valve 11 and the discharge port 22, and is disposed of. The dehumidifying agent in the dehumidifying means 13 is dehydrated and dried, and the dehumidifying means 13 can recover its dehumidifying ability.

Similarly, the crystal oscillation type moisture meter M introduces the sample gas from the sample gas inlet 9 as shown in the direction of arrow C in FIG. Then, when the sample gas is passed through the three-way valve 11, the dehumidifying means 13, the three-way valve 15, the flow rate regulator 16, the dividing valve 17, and the measuring means 4, a part of the sample gas that has passed through the dehumidifying means 13 is passed through the dividing valve, if desired. 17 to the bypass 19 , passes through the capillary 18 , the three-way valve 14 , the dehumidification means 12 , and the three-way valve 10 to the exhaust port 23
It has a structure that allows it to flow from the inside to the outside.

Therefore, if the dehumidifying ability of the dehumidifying means 13 is sufficient in advance,
When the dehumidifying ability of the dehumidifying means 12 is reduced, the sample gas is introduced from the sample gas inlet 9 and the sample gas, which has been dehumidified and dried after passing through the dehumidifying means 13, is transferred to the measuring means 4 from the flow dividing valve 17. flow to.

In addition, a part of the dehumidified and dry sample gas is diverted from the diverter valve 17 to the bypass 19, and the capillary 18 and the three-way valve 14 are
, and the dehumidifying agent in the dehumidifying means 12 is heated to 350° C. by activating the heater, which is the dehumidifying ability recovery means 20 of the dehumidifying means 12. Here, the moisture adsorbed on the dehumidifier of the dehumidifying means 12 is absorbed by the dehumidified and dry sample gas sent, and the water is transferred to the three-way valve 10 and the exhaust port 23.
It is transported to the outside and disposed of. The dehumidifying agent in the dehumidifying means 12 is dehydrated and dried, and the dehumidifying means 12 can recover its dehumidifying ability.

From the above, even if the dehumidifying ability of either one of the dehumidifying means 12, 13 is reduced, if the other has a high dehumidifying ability, the three-way valve 10, 11, 14, 15 and the diversion valve 17 can be controlled. One of the dehumidifying means whose dehumidifying ability has decreased during measurement can recover its dehumidifying ability and standby for the other dehumidifying means, and by alternately using the dehumidifying means 12 and 13 in the dry channel, continuous measurement can be continued.

In addition, when one of the dehumidifying means 12 and 13 is used in the dry channel, the other can be in a state where the dehumidifying ability is high, so the decrease in the dehumidifying ability of one dehumidifying means due to measurement is This can be checked by switching to the channel containing the other dehumidifying means having a higher dehumidifying capacity, and reading and comparing the measurement results obtained from the channels passing through the two dehumidifying means 12 and 13, respectively, from the measuring means 4. Note that the dehumidifying means 12
To check the dehumidification capacity of ゜13, check the dehumidification means 12゜1.
The dehumidification process is carried out within the specified time considering the ability unique to the dehumidifying agent (3), for example, the maximum time during which the sample gas can flow.

Since the crystal oscillation type moisture meter M incorporates the dehumidifying capacity recovery means 20 and 21 as one unit and is configured to be handled as described above, the dehumidifying capacity of the respective dehumidifying means 12 and 13 can be easily recovered. can.

In addition, since the crystal oscillation type moisture meter M is capable of continuous measurement and the dehumidifying capacity recovery operation of the dehumidifying means 12, 13 is simple, running costs can be kept low.

FIG. 3 shows another embodiment of the invention. The crystal oscillation type moisture meter Mb selectively flows a sample gas from a sample gas inlet 9b to either one of the dehumidifying means 12b and 13b, and a part of the dehumidified sample gas is passed through one of the dehumidifying means. It is configured to constantly flow to the other dehumidifying means to ensure recovery of the dehumidifying ability of the other dehumidifying means. That is, when the sample gas is allowed to flow through the dehumidifying means 12b, the flow path is in the direction of the arrow Bb force, and when the sample gas is allowed to flow through the dehumidifying means 13b, the flow path is in the direction of the arrow cb force.

FIG. 4 shows still another embodiment of the invention. The crystal oscillation type moisture meter MC dehumidifies the other dehumidifying means by constantly flowing a part of the sample gas that has been selectively dehumidified by passing it through one of the dehumidifying means 12C and 113c to the other dehumidifying means via the bypass 19c. It is structured to ensure recovery of abilities.

That is, when the sample gas is allowed to flow through the dehumidifying means 120, the flow path is in the direction of the arrow Bch, and when the sample gas is allowed to flow through the dehumidifying means 13c, the flow path is in the direction of the arrow CC.

(g) Effects of the Invention According to the present invention, continuous measurement is possible without missing measurements, the dehumidification ability recovery operation of the dehumidification means is simple, and furthermore, it is possible to check for a decrease in the dehumidification ability of the dehumidification means. The effect is being obtained.

In addition, there is an advantage that running costs can be reduced.

[Brief explanation of the drawing]

1 and 2 are structural explanatory diagrams showing one embodiment of the present invention and its operation, FIG. 3 is a structural explanatory diagram showing another embodiment of the present invention and its operation, and FIG. 4 is a further embodiment of the present invention. FIG. 5 is an explanatory diagram showing a conventional example and its operation. M...Crystal oscillation type moisture meter, 1.9...Sample gas inlet, 4...
Measuring means, 10.11, 14.15... Three-way valve, 12.13... Dehumidifying means, 17...
・Diversion valve, 19... Bypass,

Claims (1)

[Claims] 1. A wet flow path through which the sample gas can pass from the first sample gas inlet through the first flow rate adjusting means to the measuring means incorporating a crystal humidity sensor; A sample gas inlet, first and second three-way valves connected to the second sample gas inlet, a dehumidifier and a dehumidification capacity recovery means for the dehumidifier, and the first and second three-way valves Consisting of first and second dehumidifying means connected to each other, and a second flow rate adjusting means interposed and connected between the first and second dehumidifying means and the measuring means, the sample gas is transferred to the second The sample gas is introduced from the sample gas inlet, and is controlled by each three-way valve to flow through the first three-way valve, the first dehumidifying means, and the second flow rate adjusting means to the measuring means, and if desired, the sample gas is A portion of the dehumidifying means can be passed through the second dehumidifying means and the second three-way valve to the outside to restore the dehumidifying ability of the second dehumidifying means, and each of the three-way valves can be controlled to control the second three-way valve and the second three-way valve. Flowing to the measuring means via the second dehumidifying means and the second flow rate adjusting means,
A quartz crystal comprising a dry channel configured to allow a portion of the sample gas to flow to the outside through a first dehumidifying means and a first three-way valve to restore the dehumidifying ability of the first dehumidifying means, if desired. Oscillating moisture meter. 2. The crystal oscillation type moisture meter according to claim 1, wherein the dehumidifying agent is synthetic fluorite, and the dehumidifying ability recovery means is a heater.