JPS63177051U - - Google Patents
Info
- Publication number
- JPS63177051U JPS63177051U JP6676387U JP6676387U JPS63177051U JP S63177051 U JPS63177051 U JP S63177051U JP 6676387 U JP6676387 U JP 6676387U JP 6676387 U JP6676387 U JP 6676387U JP S63177051 U JPS63177051 U JP S63177051U
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- region
- depositing
- semiconductor device
- integrated circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002955 isolation Methods 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Local Oxidation Of Silicon (AREA)
- Element Separation (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6676387U JPS63177051U (el) | 1987-05-06 | 1987-05-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6676387U JPS63177051U (el) | 1987-05-06 | 1987-05-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63177051U true JPS63177051U (el) | 1988-11-16 |
Family
ID=30905058
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6676387U Pending JPS63177051U (el) | 1987-05-06 | 1987-05-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63177051U (el) |
-
1987
- 1987-05-06 JP JP6676387U patent/JPS63177051U/ja active Pending