JPS63176059U - - Google Patents
Info
- Publication number
- JPS63176059U JPS63176059U JP1986160250U JP16025086U JPS63176059U JP S63176059 U JPS63176059 U JP S63176059U JP 1986160250 U JP1986160250 U JP 1986160250U JP 16025086 U JP16025086 U JP 16025086U JP S63176059 U JPS63176059 U JP S63176059U
- Authority
- JP
- Japan
- Prior art keywords
- polishing pad
- stamper
- stamper holder
- axis
- rotates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims 6
Description
第１図は本考案による装置の要部の概念的断面
図。第２図は第１図の―線による概念的平面
図。
図中符号、１：スタンパー、２：ホルダー、４
：研磨パツド。
FIG. 1 is a conceptual cross-sectional view of the main parts of the device according to the present invention. Figure 2 is a conceptual plan view taken along the - line in Figure 1. Codes in the figure: 1: Stamper, 2: Holder, 4
: Polished pad.
Claims (1)
配置されたスタンパー保持具と、上記研磨パツド
と上記スタンパー保持具とを相対回転運動させる
手段とを含むスタンパーの裏面研磨装置において
、上記スタンパー保持具のスタンパー取付け面に
円錐状または逆円錐状にテーパーが付けられてい
ることを特徴とする装置。 (2) 上記スタンパー保持具が自転し且つ研磨パ
ツドに対して公転し、且つ研磨パツドが自転する
ことを特徴とする実用新案登録請求の範囲第１項
記載の装置。[Claims for Utility Model Registration] (1) A stamper comprising a polishing pad, a stamper holder disposed opposite to the polishing pad, and means for relatively rotating the polishing pad and the stamper holder. A back polishing device, wherein the stamper mounting surface of the stamper holder is tapered in a conical or inverted conical shape. (2) The apparatus according to claim 1, wherein the stamper holder rotates on its own axis and revolves around the polishing pad, and the polishing pad rotates on its own axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986160250U JPS63176059U (en) | 1986-10-20 | 1986-10-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986160250U JPS63176059U (en) | 1986-10-20 | 1986-10-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63176059U true JPS63176059U (en) | 1988-11-15 |
Family
ID=31085454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986160250U Pending JPS63176059U (en) | 1986-10-20 | 1986-10-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63176059U (en) |
-
1986
- 1986-10-20 JP JP1986160250U patent/JPS63176059U/ja active Pending
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