JPS63176059U - - Google Patents
Info
- Publication number
- JPS63176059U JPS63176059U JP1986160250U JP16025086U JPS63176059U JP S63176059 U JPS63176059 U JP S63176059U JP 1986160250 U JP1986160250 U JP 1986160250U JP 16025086 U JP16025086 U JP 16025086U JP S63176059 U JPS63176059 U JP S63176059U
- Authority
- JP
- Japan
- Prior art keywords
- polishing pad
- stamper
- stamper holder
- axis
- rotates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims 6
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986160250U JPS63176059U (da) | 1986-10-20 | 1986-10-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986160250U JPS63176059U (da) | 1986-10-20 | 1986-10-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63176059U true JPS63176059U (da) | 1988-11-15 |
Family
ID=31085454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986160250U Pending JPS63176059U (da) | 1986-10-20 | 1986-10-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63176059U (da) |
-
1986
- 1986-10-20 JP JP1986160250U patent/JPS63176059U/ja active Pending