JPS6317530A - 磁気増強型リアクテイブイオンエツチング装置 - Google Patents

磁気増強型リアクテイブイオンエツチング装置

Info

Publication number
JPS6317530A
JPS6317530A JP16174386A JP16174386A JPS6317530A JP S6317530 A JPS6317530 A JP S6317530A JP 16174386 A JP16174386 A JP 16174386A JP 16174386 A JP16174386 A JP 16174386A JP S6317530 A JPS6317530 A JP S6317530A
Authority
JP
Japan
Prior art keywords
ion etching
reactive ion
coils
wafer
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16174386A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0573256B2 (show.php
Inventor
Uirukinson Ooen
オーエン　ウィルキンソン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP16174386A priority Critical patent/JPS6317530A/ja
Publication of JPS6317530A publication Critical patent/JPS6317530A/ja
Publication of JPH0573256B2 publication Critical patent/JPH0573256B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP16174386A 1986-07-09 1986-07-09 磁気増強型リアクテイブイオンエツチング装置 Granted JPS6317530A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16174386A JPS6317530A (ja) 1986-07-09 1986-07-09 磁気増強型リアクテイブイオンエツチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16174386A JPS6317530A (ja) 1986-07-09 1986-07-09 磁気増強型リアクテイブイオンエツチング装置

Publications (2)

Publication Number Publication Date
JPS6317530A true JPS6317530A (ja) 1988-01-25
JPH0573256B2 JPH0573256B2 (show.php) 1993-10-14

Family

ID=15741039

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16174386A Granted JPS6317530A (ja) 1986-07-09 1986-07-09 磁気増強型リアクテイブイオンエツチング装置

Country Status (1)

Country Link
JP (1) JPS6317530A (show.php)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4963242A (en) * 1988-05-23 1990-10-16 Nippon Telegraph And Telephone Corporation Plasma etching apparatus
US7316761B2 (en) 2003-02-03 2008-01-08 Applied Materials, Inc. Apparatus for uniformly etching a dielectric layer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6094725A (ja) * 1983-10-28 1985-05-27 Hitachi Ltd ドライエツチング装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6094725A (ja) * 1983-10-28 1985-05-27 Hitachi Ltd ドライエツチング装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4963242A (en) * 1988-05-23 1990-10-16 Nippon Telegraph And Telephone Corporation Plasma etching apparatus
US7316761B2 (en) 2003-02-03 2008-01-08 Applied Materials, Inc. Apparatus for uniformly etching a dielectric layer

Also Published As

Publication number Publication date
JPH0573256B2 (show.php) 1993-10-14

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term