JPS6317415U - - Google Patents

Info

Publication number
JPS6317415U
JPS6317415U JP10959886U JP10959886U JPS6317415U JP S6317415 U JPS6317415 U JP S6317415U JP 10959886 U JP10959886 U JP 10959886U JP 10959886 U JP10959886 U JP 10959886U JP S6317415 U JPS6317415 U JP S6317415U
Authority
JP
Japan
Prior art keywords
flow path
displacement
solenoid
displacement member
pumping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10959886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0536170Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10959886U priority Critical patent/JPH0536170Y2/ja
Publication of JPS6317415U publication Critical patent/JPS6317415U/ja
Application granted granted Critical
Publication of JPH0536170Y2 publication Critical patent/JPH0536170Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
JP10959886U 1986-07-17 1986-07-17 Expired - Lifetime JPH0536170Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10959886U JPH0536170Y2 (enExample) 1986-07-17 1986-07-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10959886U JPH0536170Y2 (enExample) 1986-07-17 1986-07-17

Publications (2)

Publication Number Publication Date
JPS6317415U true JPS6317415U (enExample) 1988-02-05
JPH0536170Y2 JPH0536170Y2 (enExample) 1993-09-13

Family

ID=30987836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10959886U Expired - Lifetime JPH0536170Y2 (enExample) 1986-07-17 1986-07-17

Country Status (1)

Country Link
JP (1) JPH0536170Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4868393B2 (ja) * 2006-03-10 2012-02-01 独立行政法人産業技術総合研究所 流量計

Also Published As

Publication number Publication date
JPH0536170Y2 (enExample) 1993-09-13

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