JPS63172951U - - Google Patents
Info
- Publication number
- JPS63172951U JPS63172951U JP6410487U JP6410487U JPS63172951U JP S63172951 U JPS63172951 U JP S63172951U JP 6410487 U JP6410487 U JP 6410487U JP 6410487 U JP6410487 U JP 6410487U JP S63172951 U JPS63172951 U JP S63172951U
- Authority
- JP
- Japan
- Prior art keywords
- ions
- power source
- electrode
- hereinafter referred
- resolution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001133 acceleration Effects 0.000 claims description 2
- 230000005684 electric field Effects 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 claims 7
- 238000001228 spectrum Methods 0.000 claims 3
- 238000001819 mass spectrum Methods 0.000 claims 2
- 238000001125 extrusion Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6410487U JPS63172951U (enrdf_load_stackoverflow) | 1987-04-30 | 1987-04-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6410487U JPS63172951U (enrdf_load_stackoverflow) | 1987-04-30 | 1987-04-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63172951U true JPS63172951U (enrdf_load_stackoverflow) | 1988-11-10 |
Family
ID=30899959
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6410487U Pending JPS63172951U (enrdf_load_stackoverflow) | 1987-04-30 | 1987-04-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63172951U (enrdf_load_stackoverflow) |
-
1987
- 1987-04-30 JP JP6410487U patent/JPS63172951U/ja active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS63172951U (enrdf_load_stackoverflow) | ||
US3588495A (en) | Mass spectrometers having adjustable beam defining slits | |
JPH0615389Y2 (ja) | ビ−ム走査装置 | |
JPH079333Y2 (ja) | イオン発生装置 | |
JPS61104960U (enrdf_load_stackoverflow) | ||
JPS629356U (enrdf_load_stackoverflow) | ||
JPH01112554U (enrdf_load_stackoverflow) | ||
JPH0728695Y2 (ja) | イオン注入装置 | |
JPS6387762U (enrdf_load_stackoverflow) | ||
JPH0343743B2 (enrdf_load_stackoverflow) | ||
JPS5927383B2 (ja) | イオンビ−ム薄膜作成装置 | |
JPH0162651U (enrdf_load_stackoverflow) | ||
JPH0229151U (enrdf_load_stackoverflow) | ||
JPS63167655U (enrdf_load_stackoverflow) | ||
JPS6253558U (enrdf_load_stackoverflow) | ||
JPS63112747U (enrdf_load_stackoverflow) | ||
JPH0254156U (enrdf_load_stackoverflow) | ||
JPS63157158U (enrdf_load_stackoverflow) | ||
JPS63111750U (enrdf_load_stackoverflow) | ||
JPH04129155A (ja) | イオンマイクロアナライザ | |
JPS63131060U (enrdf_load_stackoverflow) | ||
JPH04192249A (ja) | 二次イオン質量分析方法 | |
JPH061260B2 (ja) | 質量分析計 | |
JPH0250952U (enrdf_load_stackoverflow) | ||
JPH02154143A (ja) | 高周波プラズマ微量元素分析装置 |