JPS63172556U - - Google Patents
Info
- Publication number
- JPS63172556U JPS63172556U JP6514187U JP6514187U JPS63172556U JP S63172556 U JPS63172556 U JP S63172556U JP 6514187 U JP6514187 U JP 6514187U JP 6514187 U JP6514187 U JP 6514187U JP S63172556 U JPS63172556 U JP S63172556U
- Authority
- JP
- Japan
- Prior art keywords
- abrasive cloth
- cylindrical lens
- disposed
- holding
- holding substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 5
- 239000004744 fabric Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 2
Landscapes
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6514187U JPS63172556U (da) | 1987-04-28 | 1987-04-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6514187U JPS63172556U (da) | 1987-04-28 | 1987-04-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63172556U true JPS63172556U (da) | 1988-11-09 |
Family
ID=30901941
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6514187U Pending JPS63172556U (da) | 1987-04-28 | 1987-04-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63172556U (da) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101075954B1 (ko) | 2008-10-29 | 2011-10-21 | 주식회사 케이엔제이 | 기판 연마장치 및 방법 |
-
1987
- 1987-04-28 JP JP6514187U patent/JPS63172556U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101075954B1 (ko) | 2008-10-29 | 2011-10-21 | 주식회사 케이엔제이 | 기판 연마장치 및 방법 |