JPH02131338U - - Google Patents
Info
- Publication number
- JPH02131338U JPH02131338U JP4088089U JP4088089U JPH02131338U JP H02131338 U JPH02131338 U JP H02131338U JP 4088089 U JP4088089 U JP 4088089U JP 4088089 U JP4088089 U JP 4088089U JP H02131338 U JPH02131338 U JP H02131338U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- polishing
- cloth
- polishing cloth
- clamps
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000004744 fabric Substances 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4088089U JPH02131338U (da) | 1989-04-06 | 1989-04-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4088089U JPH02131338U (da) | 1989-04-06 | 1989-04-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02131338U true JPH02131338U (da) | 1990-10-31 |
Family
ID=31551058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4088089U Pending JPH02131338U (da) | 1989-04-06 | 1989-04-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02131338U (da) |
-
1989
- 1989-04-06 JP JP4088089U patent/JPH02131338U/ja active Pending