JPS63172127U - - Google Patents
Info
- Publication number
- JPS63172127U JPS63172127U JP6459487U JP6459487U JPS63172127U JP S63172127 U JPS63172127 U JP S63172127U JP 6459487 U JP6459487 U JP 6459487U JP 6459487 U JP6459487 U JP 6459487U JP S63172127 U JPS63172127 U JP S63172127U
- Authority
- JP
- Japan
- Prior art keywords
- container
- semiconductor
- boat
- semiconductor processing
- reaction tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6459487U JPS63172127U (en17) | 1987-04-28 | 1987-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6459487U JPS63172127U (en17) | 1987-04-28 | 1987-04-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63172127U true JPS63172127U (en17) | 1988-11-09 |
Family
ID=30900893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6459487U Pending JPS63172127U (en17) | 1987-04-28 | 1987-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63172127U (en17) |
-
1987
- 1987-04-28 JP JP6459487U patent/JPS63172127U/ja active Pending