JPH0189730U - - Google Patents
Info
- Publication number
- JPH0189730U JPH0189730U JP18512187U JP18512187U JPH0189730U JP H0189730 U JPH0189730 U JP H0189730U JP 18512187 U JP18512187 U JP 18512187U JP 18512187 U JP18512187 U JP 18512187U JP H0189730 U JPH0189730 U JP H0189730U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum container
- vacuum
- manufacturing equipment
- semiconductor manufacturing
- curvature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18512187U JPH0189730U (en17) | 1987-12-04 | 1987-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18512187U JPH0189730U (en17) | 1987-12-04 | 1987-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0189730U true JPH0189730U (en17) | 1989-06-13 |
Family
ID=31476449
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18512187U Pending JPH0189730U (en17) | 1987-12-04 | 1987-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0189730U (en17) |
-
1987
- 1987-12-04 JP JP18512187U patent/JPH0189730U/ja active Pending