JPS63170948U - - Google Patents
Info
- Publication number
- JPS63170948U JPS63170948U JP6148787U JP6148787U JPS63170948U JP S63170948 U JPS63170948 U JP S63170948U JP 6148787 U JP6148787 U JP 6148787U JP 6148787 U JP6148787 U JP 6148787U JP S63170948 U JPS63170948 U JP S63170948U
- Authority
- JP
- Japan
- Prior art keywords
- objects
- transport unit
- processing
- robot arm
- transport
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6148787U JPS63170948U (en, 2012) | 1987-04-24 | 1987-04-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6148787U JPS63170948U (en, 2012) | 1987-04-24 | 1987-04-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63170948U true JPS63170948U (en, 2012) | 1988-11-07 |
Family
ID=30894872
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6148787U Pending JPS63170948U (en, 2012) | 1987-04-24 | 1987-04-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63170948U (en, 2012) |
-
1987
- 1987-04-24 JP JP6148787U patent/JPS63170948U/ja active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH0285361U (en, 2012) | ||
JPS63170948U (en, 2012) | ||
JPS58160397U (ja) | 大型物品を搬入可能なグロ−ブボツクス | |
JPS6381032U (en, 2012) | ||
JPS62107441U (en, 2012) | ||
JPS6120245U (ja) | 長尺物の自動搬出入装置 | |
JPH089049Y2 (ja) | 自動基板供給・収納装置 | |
JPH0463339U (en, 2012) | ||
JPS63122789U (en, 2012) | ||
JPS63106128U (en, 2012) | ||
JPH02108933U (en, 2012) | ||
JPH03104476U (en, 2012) | ||
JPS59142210U (ja) | 物品搬出入装置 | |
JPS6341018U (en, 2012) | ||
JPS63170471U (en, 2012) | ||
JPH0319651U (en, 2012) | ||
JPH028909U (en, 2012) | ||
JPS63183130U (en, 2012) | ||
JPS58114226U (ja) | 移載荷物保持装置 | |
JPH0454766U (en, 2012) | ||
JPS5863938U (ja) | 加工装置の搬入搬出装置 | |
JPS62159238U (en, 2012) | ||
JPH01117852U (en, 2012) | ||
JPS6099531U (ja) | ウエハーホルダ | |
JPH0364938U (en, 2012) |