JPS63170468U - - Google Patents
Info
- Publication number
- JPS63170468U JPS63170468U JP6348187U JP6348187U JPS63170468U JP S63170468 U JPS63170468 U JP S63170468U JP 6348187 U JP6348187 U JP 6348187U JP 6348187 U JP6348187 U JP 6348187U JP S63170468 U JPS63170468 U JP S63170468U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- holder
- mounting base
- ion milling
- holder mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000992 sputter etching Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 2
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6348187U JPS63170468U (en, 2012) | 1987-04-28 | 1987-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6348187U JPS63170468U (en, 2012) | 1987-04-28 | 1987-04-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63170468U true JPS63170468U (en, 2012) | 1988-11-07 |
Family
ID=30898748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6348187U Pending JPS63170468U (en, 2012) | 1987-04-28 | 1987-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63170468U (en, 2012) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61103531A (ja) * | 1984-10-25 | 1986-05-22 | Ulvac Corp | 真空処理装置における基板の冷却機構 |
| JPS6127333B2 (en, 2012) * | 1980-11-22 | 1986-06-25 | Nippon Denki Hoomu Erekutoronikusu Kk | |
| JPS61212023A (ja) * | 1985-03-18 | 1986-09-20 | Hitachi Ltd | ドライエッチング装置 |
-
1987
- 1987-04-28 JP JP6348187U patent/JPS63170468U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6127333B2 (en, 2012) * | 1980-11-22 | 1986-06-25 | Nippon Denki Hoomu Erekutoronikusu Kk | |
| JPS61103531A (ja) * | 1984-10-25 | 1986-05-22 | Ulvac Corp | 真空処理装置における基板の冷却機構 |
| JPS61212023A (ja) * | 1985-03-18 | 1986-09-20 | Hitachi Ltd | ドライエッチング装置 |