JPS63170466U - - Google Patents

Info

Publication number
JPS63170466U
JPS63170466U JP6182387U JP6182387U JPS63170466U JP S63170466 U JPS63170466 U JP S63170466U JP 6182387 U JP6182387 U JP 6182387U JP 6182387 U JP6182387 U JP 6182387U JP S63170466 U JPS63170466 U JP S63170466U
Authority
JP
Japan
Prior art keywords
reaction tube
wafer boat
conduction plate
reduced pressure
pressure cvd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6182387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0441177Y2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6182387U priority Critical patent/JPH0441177Y2/ja
Publication of JPS63170466U publication Critical patent/JPS63170466U/ja
Application granted granted Critical
Publication of JPH0441177Y2 publication Critical patent/JPH0441177Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP6182387U 1987-04-23 1987-04-23 Expired JPH0441177Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6182387U JPH0441177Y2 (enrdf_load_html_response) 1987-04-23 1987-04-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6182387U JPH0441177Y2 (enrdf_load_html_response) 1987-04-23 1987-04-23

Publications (2)

Publication Number Publication Date
JPS63170466U true JPS63170466U (enrdf_load_html_response) 1988-11-07
JPH0441177Y2 JPH0441177Y2 (enrdf_load_html_response) 1992-09-28

Family

ID=30895511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6182387U Expired JPH0441177Y2 (enrdf_load_html_response) 1987-04-23 1987-04-23

Country Status (1)

Country Link
JP (1) JPH0441177Y2 (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002060947A (ja) * 2000-07-07 2002-02-28 Asm Internatl Nv 原子層のｃｖｄ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002060947A (ja) * 2000-07-07 2002-02-28 Asm Internatl Nv 原子層のｃｖｄ

Also Published As

Publication number Publication date
JPH0441177Y2 (enrdf_load_html_response) 1992-09-28

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