JPS63170460U - - Google Patents
Info
- Publication number
- JPS63170460U JPS63170460U JP6310187U JP6310187U JPS63170460U JP S63170460 U JPS63170460 U JP S63170460U JP 6310187 U JP6310187 U JP 6310187U JP 6310187 U JP6310187 U JP 6310187U JP S63170460 U JPS63170460 U JP S63170460U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- bucking
- fluid
- bucking plate
- cool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 239000012809 cooling fluid Substances 0.000 claims 1
- 239000012530 fluid Substances 0.000 claims 1
- 238000005477 sputtering target Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6310187U JPS63170460U (cs) | 1987-04-24 | 1987-04-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6310187U JPS63170460U (cs) | 1987-04-24 | 1987-04-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63170460U true JPS63170460U (cs) | 1988-11-07 |
Family
ID=30898010
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6310187U Pending JPS63170460U (cs) | 1987-04-24 | 1987-04-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63170460U (cs) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006503984A (ja) * | 2002-10-24 | 2006-02-02 | ハネウエル・インターナシヨナル・インコーポレーテツド | 冷却能を向上させると共に撓みおよび変形を減少させるターゲットの設計およびその関連方法 |
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1987
- 1987-04-24 JP JP6310187U patent/JPS63170460U/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006503984A (ja) * | 2002-10-24 | 2006-02-02 | ハネウエル・インターナシヨナル・インコーポレーテツド | 冷却能を向上させると共に撓みおよび変形を減少させるターゲットの設計およびその関連方法 |
JP2011052325A (ja) * | 2002-10-24 | 2011-03-17 | Honeywell Internatl Inc | 冷却能を向上させると共に撓みおよび変形を減少させるターゲットの設計およびその関連方法 |
JP2014051746A (ja) * | 2002-10-24 | 2014-03-20 | Honeywell Internatl Inc | 冷却能を向上させると共に撓みおよび変形を減少させるターゲットの設計およびその関連方法 |