JPS63170460U - - Google Patents
Info
- Publication number
- JPS63170460U JPS63170460U JP6310187U JP6310187U JPS63170460U JP S63170460 U JPS63170460 U JP S63170460U JP 6310187 U JP6310187 U JP 6310187U JP 6310187 U JP6310187 U JP 6310187U JP S63170460 U JPS63170460 U JP S63170460U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- bucking
- fluid
- bucking plate
- cool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 239000012809 cooling fluid Substances 0.000 claims 1
- 239000012530 fluid Substances 0.000 claims 1
- 238000005477 sputtering target Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例におけるスパツタ装
置の断正面図、第２図は従来のスパツタ装置の断
正面図である。
１……バツキングプレート、２……ターゲツト
、６……流水、７……冷却面。
FIG. 1 is a sectional front view of a sputtering device according to an embodiment of the present invention, and FIG. 2 is a sectional front view of a conventional sputtering device. 1...Bucking plate, 2...Target, 6...Running water, 7...Cooling surface.
Claims (1)
下面にバツキングプレートを接合し、このバツキ
ングプレートの下面にこのバツキングプレートを
冷却する冷却用流体を通す通路を設け、この流体
で冷却する前記バツキングプレートの下面を中央
付近が凸であり、外側に向つて傾斜するように形
成したスパツタ装置。 A bucking plate is bonded to the lower surface of a sputtering target installed almost horizontally, a passage is provided on the lower surface of the bucking plate through which a cooling fluid is passed to cool the bucking plate, and the backing plate is cooled by the fluid. A sputtering device in which the bottom surface of the plate is convex near the center and slopes outward.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6310187U JPS63170460U (en) | 1987-04-24 | 1987-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6310187U JPS63170460U (en) | 1987-04-24 | 1987-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63170460U true JPS63170460U (en) | 1988-11-07 |
Family
ID=30898010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6310187U Pending JPS63170460U (en) | 1987-04-24 | 1987-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63170460U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006503984A (en) * | 2002-10-24 | 2006-02-02 | ハネウエル・インターナシヨナル・インコーポレーテツド | Target design and related methods for improving cooling capacity and reducing deflection and deformation |
-
1987
- 1987-04-24 JP JP6310187U patent/JPS63170460U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006503984A (en) * | 2002-10-24 | 2006-02-02 | ハネウエル・インターナシヨナル・インコーポレーテツド | Target design and related methods for improving cooling capacity and reducing deflection and deformation |
| JP2011052325A (en) * | 2002-10-24 | 2011-03-17 | Honeywell Internatl Inc | Target design and related method for enhanced cooling and reduced deflection and deformation |
| JP2014051746A (en) * | 2002-10-24 | 2014-03-20 | Honeywell Internatl Inc | Design of target capable of increasing cooling capability and decreasing deflection and deformation and related methods for the same |
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