JPS63168530A - Inspection of light distribution characteristic for lighting apparatus - Google Patents
Inspection of light distribution characteristic for lighting apparatusInfo
- Publication number
- JPS63168530A JPS63168530A JP61313369A JP31336986A JPS63168530A JP S63168530 A JPS63168530 A JP S63168530A JP 61313369 A JP61313369 A JP 61313369A JP 31336986 A JP31336986 A JP 31336986A JP S63168530 A JPS63168530 A JP S63168530A
- Authority
- JP
- Japan
- Prior art keywords
- light distribution
- binary
- illuminator
- light
- position data
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 title abstract description 12
- 238000001514 detection method Methods 0.000 claims abstract description 4
- 230000005484 gravity Effects 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 6
- 238000003384 imaging method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 11
- 238000013075 data extraction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 101150037263 PIP2 gene Proteins 0.000 description 1
- 101100262439 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) UBA2 gene Proteins 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000004148 unit process Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、照明器から照射場れる光の分布状態（配光
特性）ｔ−検査するための検査方法に関する０
〔従来の技術〕
従来、この種の検査は殆んど人手に委ねられている。す
なわち、照明器からの照射光が投影されるスクリーン上
に照度計を置いて各点の照度を測定し、人手にＬり配光
曲線の算出、基準白線からのずれ量及び最大光度位置と
そのずれ量等を求め、このずれ量を判定してその検査を
行なうようにしている。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an inspection method for inspecting the distribution state (light distribution characteristics) of light emitted from an illuminator. [Prior Art] Conventionally, This type of inspection is mostly left to humans. In other words, an illuminance meter is placed on the screen on which the light emitted from the illuminator is projected, and the illuminance at each point is measured, and the illuminance is calculated manually, the amount of deviation from the reference white line, the maximum luminous intensity position, and the like. The amount of deviation, etc. is determined, and the inspection is performed by determining the amount of deviation.
しかしながら、このような方法では多大の時間が必要と
なるだけでなく信頼性に乏しいと云う、人手にＬるもの
固有の問題かめる。However, such a method requires a large amount of time and is unreliable, which is an inherent problem in the manual method.
したがって、この発明はこの種の検査を自動化すること
に工ｐ、高速かつ正確な検査を可能にすることを目的と
する。Therefore, it is an object of the present invention to automate this type of inspection and to enable high-speed and accurate inspection.
スクリーン上に投影される照明器からの照射光の分布（
配光）状態と撮像装置により撮像し、その撮像信号を所
定の光度レベルおよび最大光度近傍レベルでそれぞｔ″
Ｌ２Ｌ２値化なくとも２種類の配光２値化画像を抽出し
、前者の配光２値化画像については、基準となる配光曲
線に沿う複数のウィンドウを発生させて配光位置データ
を抽出し、この位置データから配光の外形形状を演算し
て基準配光曲線からのず７′Ｌ）ｔ’を求め、後者の配
光２値化画像についてはその重心で表わされる最大光度
位置と演算してその基準位置からのすｒＬ量を求め、各
ずれ量をそれぞれの設定値と比較して照明器の配光特性
全検査する。Distribution of light emitted from the illuminator projected onto the screen (
(light distribution) state and an image capturing device, and transmit the image signal at a predetermined luminous intensity level and a level near the maximum luminous intensity at t'', respectively.
L2L binarization At least two types of light distribution binarized images are extracted, and for the former light distribution binarized image, multiple windows are generated along the reference light distribution curve and light distribution position data is extracted. Then, calculate the external shape of the light distribution from this position data to find the deviation from the standard light distribution curve, and for the latter binary light distribution image, calculate the maximum luminous intensity position represented by its center of gravity. The amount of SrL from the reference position is calculated, and each deviation amount is compared with each set value to fully inspect the light distribution characteristics of the illuminator.
所定位置にセントされた照明器から照射される元金スク
リーン上で受け、スクリーン上の配光をテレビカメラ等
の撮像装置で撮像して適宜な画像処理を行なうことにニ
ジ少なくとも２種類の配光曲線を求め、基準配光曲線か
らのずれ量お：び最大光度基準位置からのすれ＊−にそ
れぞれ求め、これら全それぞれ設定値と比較して検査を
行なうことにニジ検査を自動化し、高速かつ正確な検査
を可能にする。At least two types of light distribution are used, in which light is received on a screen that is irradiated from an illuminator placed at a predetermined position, and the light distribution on the screen is imaged with an imaging device such as a television camera to perform appropriate image processing. The curve is calculated, the amount of deviation from the reference light distribution curve and the deviation from the maximum luminous intensity reference position are determined, and the inspection is performed by comparing all of these with the set values. Enables accurate inspection.
（実施例）
第１図はこの発明の実施列を示すフローチャート、第２
図はこの発明が適用される画像処理装置を示す全体構成
図、Ｍ３図は画像処理部の詳細を示す１０７２図、第４
図は配光２値化画像とウィンドウとの関係を説明するた
めの説明図、第５図は位置データの抽出方法乞説明する
ための説明図、第６図は配光ずれ量を説明するための説
明図、第７図は最大光度位置データ全説明するための説
明図である。(Example) FIG. 1 is a flowchart showing the implementation sequence of this invention, and FIG.
The figure is an overall configuration diagram showing an image processing device to which the present invention is applied, Figure M3 is a diagram 1072 showing details of the image processing section,
The figure is an explanatory diagram to explain the relationship between the light distribution binary image and the window, Figure 5 is an explanatory diagram to explain the method of extracting position data, and Figure 6 is an explanatory diagram to explain the amount of light distribution shift. FIG. 7 is an explanatory diagram for fully explaining the maximum luminous intensity position data.
以下、これらの図につき、まず第２図がら説明する。な
お、同図において、１は照明器、２はスクリーン、３は
テレビカメラ等の撮像装置、４は画像処理部でるる。Below, these figures will be explained first with reference to FIG. In the figure, 1 is an illuminator, 2 is a screen, 3 is an imaging device such as a television camera, and 4 is an image processing section.
照明器１から照射される光をスクリーン２で受け、スク
リーン上の光の分布（配光）５をテレビカメラ３で撮像
する。テレビカメラ３は、スクリーン２上の光の入射面
で反射光を撮像する位置におくか、捷たは透過性のめる
スクリーンについてはその透過光を撮像する位置におい
て、それぞれ配元金撮像する。なお、第２図に実線で示
されるカメラ位置は反射光を撮像する場合、破線で示さ
れる位置は透過光を撮像する場合をそれぞれ示す。A screen 2 receives light emitted from an illuminator 1, and a television camera 3 images the distribution of light (light distribution) 5 on the screen. The television camera 3 is placed at a position to take an image of the reflected light on the light incident surface of the screen 2, or in the case of a folded or transparent screen, takes an image of the transmitted light. Note that the camera positions indicated by solid lines in FIG. 2 indicate the cases in which reflected light is imaged, and the camera positions indicated by broken lines indicate the cases in which transmitted light is imaged.
スクリーン２は平面か、または照明器１からの距離に応
じた曲率を持たせ、照射された光の方向で光源からスク
リーン２までの光路が一定になるようにする。テレビカ
メラ３からの映像は、画像処理部４により以下のように
処理される。The screen 2 is flat or has a curvature depending on the distance from the illuminator 1, so that the optical path from the light source to the screen 2 is constant in the direction of the irradiated light. The image from the television camera 3 is processed by the image processing section 4 as follows.
第３図に示されるように、テレビカメラ３からの映像は
、まずＡ／Ｄ変換部４Ａにおいて、予め設定された光度
での配光に対応する２値化画像１５に変換される（第１
図■おＬび第４図参照）。As shown in FIG. 3, the image from the television camera 3 is first converted into a binary image 15 corresponding to the light distribution at a preset luminous intensity in the A/D converter 4A (first
(See Figure ■L and Figure 4).
すなわち、テレビカメラ３からの映像信号は人力（受光
）された光の強度に対応したレベルで出力されるので、
測定したい光度の配光に対して所定光度に対応する映像
信号レベルを調べ、そのレベルで映像信号ｔ−２１１化
し、配光２値化画像１５を得る。配光２値化画像１５に
対し、正常な照明器の示す配光の外形に合わせて設定し
た個々のデータ検出エリア（ウィンドウ）１０’ｉウィ
ンドウ発生部４Ｂより出力し、位置データ抽出部４Ｃで
このウィンドウ１０内における配光２値化画像の占める
面積１３ （Ａ）を抽出し、記憶する（第１図■および
第５図参照）。抽出された位置データをマイクロプロセ
ッサ等の処理装置（ＣＰＵ）４Ｅが読出し、各ウィンド
ウ１０毎に、ウィンドウ位置座標１１．１２（Ｐｌ、Ｐ
２）から次の（１）、（２）、（３）式、Ｊ：９、配光
座標１４ （ＰＯ（ＰＯＸ、ＰＯＹ）） を演算する
。In other words, since the video signal from the television camera 3 is output at a level corresponding to the intensity of the light received by humans,
The video signal level corresponding to a predetermined luminous intensity is checked for the light distribution of the luminous intensity to be measured, and the video signal is converted to t-211 at that level to obtain the light distribution binary image 15. For the light distribution binary image 15, each data detection area (window) 10'i set according to the outline of the light distribution shown by a normal illuminator is outputted from the window generation section 4B, and is outputted by the position data extraction section 4C. The area 13 (A) occupied by the light distribution binarized image within this window 10 is extracted and stored (see FIG. 1 (2) and FIG. 5). A processing unit (CPU) 4E such as a microprocessor reads out the extracted position data, and calculates window position coordinates 11.12 (Pl, P
2), calculate the following equations (1), (2), and (3), J: 9, and light distribution coordinates 14 (PO(POX, POY)).
ｐｏｘ＝ Ａ （Ｐ ＩＸ＋Ｐ ２Ｘ ）＋Ａ−ｃ ｐ
ＩＹ−ｐ２Ｙ）／ｂ２−ｕ＋ｐｏｙ＝ Ｌ（ＰＩＹ＋
Ｐ２Ｙ）＋Ａ・（Ｐ２Ｘ−Ｐ ＬＸ ）／Ｄ” ・・・
（２）ぴ＝（ＰＩＸ−Ｐ２Ｘ）”＋（ＰＩＹ−Ｐ２Ｙ）
’ ・−・・−・（３１これは、第５図の如く
ウィンドウ１０を矩形とし、配光の内部寄りの点で時計
回りに見た点Ｐ１゜Ｐ２を結ぶ辺の中点を通り、線分Ｐ
Ｉ Ｐ２に垂直なウィンドウ生毛・線１６上で、面積
Ａを線分ＰＩ Ｐ２に平行にならしたときの高さだけ
距離をとった位置として、ＰＯを演算するものである。pox= A (PIX+P2X)+A-c p
IY-p2Y)/b2-u+poy=L(PIY+
P2Y)+A・(P2X-PLX)/D"...
(2) Pi=(PIX-P2X)"+(PIY-P2Y)
' ・−・・−・(31 This means that the window 10 is rectangular as shown in Figure 5, and a line is drawn passing through the midpoint of the side connecting points P1 and P2 when viewed clockwise at a point closer to the inside of the light distribution. Minute P
PO is calculated as a position on the window hair line 16 perpendicular to I P2, separated by the height when the area A is made parallel to the line segment PIP2.
ウィンドウ１０は十分小さくとっておけば、ウィンドウ
内で平均化ちれた配光位置がＰＯとして演算される。し
かる後、演算された各２０点を結んで配光曲線を得る（
第１図■参照）。If the window 10 is made sufficiently small, the averaged light distribution position within the window is calculated as PO. After that, connect each of the 20 calculated points to obtain a light distribution curve (
(See Figure 1 ■).
第６図に符号２４で示てれる、基準となる配光曲線は、
第３図に示すｉ１０インタフェイス部４Ｆを介してモニ
タ４Ｇの表示を見ながら、キーボード４Ｈから曲線の位
置座標を予め入力して、メモｌ７４Ｄに記憶しておくも
のとする。そして、この基準配光曲線とテレビカメラ３
の映像から求められた配光曲線（測定配光曲線）との間
で、第６図の如く配光中心２１から引いた直線２０上で
、直線２０がそれぞれ基準配光曲線２４．測定配光曲線
２６と交わる点を求め、それぞれの点での水平方向、鉛
直方向での座標の差として、水平方向配光ずれ２３（Δ
Ｘ）、鉛直方向配光ずれ２２（ΔＹ）全求め、ΔＸ、Δ
Ｙ各々が許容ずれ量を越えたとき配光不良と判定する（
第１図■、■参照）。The reference light distribution curve indicated by the reference numeral 24 in FIG.
It is assumed that while viewing the display on the monitor 4G via the i10 interface unit 4F shown in FIG. 3, the position coordinates of the curve are input in advance from the keyboard 4H and stored in the memory 174D. Then, this reference light distribution curve and the TV camera 3
As shown in FIG. 6, on the straight line 20 drawn from the light distribution center 21, the straight line 20 corresponds to the reference light distribution curve 24. Find the points that intersect with the measured light distribution curve 26, and calculate the horizontal light distribution deviation 23 (Δ
X), vertical light distribution deviation 22 (ΔY) total calculation, ΔX, Δ
When each Y exceeds the allowable deviation amount, it is determined that the light distribution is defective (
(See Figure 1 ■, ■).
なお、配光に対し、は、設定可能な異なる複数の光度レ
ベルで２値化し、それぞれの配光中心に対して配光ずれ
を判定するものとする。Note that the light distribution is binarized at a plurality of different brightness levels that can be set, and a light distribution shift is determined with respect to each light distribution center.
次に、第７図に示すように最大光度に近い十分高い光度
レベルで２値化した痕大光度近傍配光画像の左方外形位
置データ２９ （ＰＬ） 、右方外形位置データ３０
（ＰＲ）工υ重心を演算して最大光度位置２７とし、そ
の基準位置からの水平、鉛直方向でのずれ量を求め、こ
れがずれ許容値内か否かによって良否を判定する（第１
図■、■参照）。Next, as shown in FIG. 7, the left outline position data 29 (PL) and the right outline position data 30 of the light distribution image near the large luminosity binarized at a sufficiently high luminosity level close to the maximum luminosity.
(PR) Calculate the center of gravity of the workpiece and set it as the maximum luminous intensity position 27, find the amount of deviation in the horizontal and vertical directions from the reference position, and judge whether it is acceptable or not depending on whether this is within the deviation tolerance (first
(See Figures ■, ■).
演算した測定配光曲線２６お工び基準配光曲線２４なら
びに判定結果は、ＣＰＵ４ＥＫよりｉ １０インタフェ
イス部４Ｆを介してモニタテレビ４Ｇ上に表示するとと
もに、プリンタ４工をつなげば、モニタ上の画面をプリ
ントアウトすることもできる０
〔発明の効果〕
この発明によれば、照明器から照射された光をスクリー
ン上で受け、配光をテレビカメラで撮像し、画像処理部
で配光位置データの抽出、配光曲線の演算、配光ずれ判
定、最大光度の位置検出および最大光度からの位置ずれ
判定など、照明器を所定位置に置くだけで配光演算、ず
れ判定、最大光度位置検出および位置ずれ判定が自動的
に行なわれるので、高速かつ正確な検査が可能となる利
点がもたらされる。また、位置データ抽出領域をウィン
ドウで限定することにより高速処理を可能とし、さらに
配光曲線及び判定結果をモニタ上に表示することにより
、測定した照明器の配光特性の検証を容易にすることが
できる等の利点も得られる。The calculated measurement light distribution curve 26, reference light distribution curve 24, and judgment results are displayed on the monitor TV 4G from the CPU 4EK via the i10 interface section 4F, and if the 4 printers are connected, they can be displayed on the monitor. It is also possible to print out the screen.0 [Effects of the Invention] According to the present invention, light emitted from an illuminator is received on the screen, the light distribution is imaged with a television camera, and the image processing unit processes light distribution position data. Extraction of light distribution curves, calculation of light distribution curves, light distribution deviation determination, maximum luminous intensity position detection, position deviation determination from maximum luminous intensity, etc., simply by placing the illuminator in a predetermined position. Since positional deviation determination is automatically performed, there is an advantage that high-speed and accurate inspection is possible. In addition, by limiting the position data extraction area with a window, high-speed processing is possible, and by displaying the light distribution curve and judgment results on a monitor, it is easy to verify the light distribution characteristics of the measured illuminator. There are also advantages such as the ability to
第１図はこの発明の実施例を示すフローチャート、第２
図はこの発明が適用式れる画像処理装置を示す全体構成
図、第３図は画像処理部の詳細を示すブロック図、第４
図は配光２値化画像とウィンドウとの関係を説明するた
めの説明図、第５図は位置データの抽出方法を説明する
ための説明図、第６目は配光ずれ量（ｆ−説明するため
の説明図、第７図は最大光度位置データを説明する九め
の説明図である。
符号説明
１・・・照明器、２・・・スクリーン、３・・・テレビ
カメラ、４・・・画像処理部、５・・・光の分布（配光
）、４Ａ・・・Ａ／Ｄ 変換部、４Ｂ・・・ウィンドウ
発生部、４Ｃ・・・位置データ抽出部、４Ｄ・・・メモ
リ、４Ｅ・・・プロセッサ（ＣＰＵ）、４Ｆ・・・１／
１０インタフ工イス部、４Ｇ・・・モニタテレビ、４Ｈ
・・・キーボード、４Ｉ・・・プリンタ、１０・・・ウ
ィンドウ、１５・・・配光２値化画像、２０・・・ウィ
ンドウ中心線、２１・・・配光中心、２４・・・基準配
光曲線、２６・・・測定配光曲線、２７・・・最大光度
位置、２８・・・最大光度近傍配光画像。
代理人 弁理士 並 木 昭 夫
代理人 弁理士 松 崎 清
第１図
第２図
第３図
第４図
第５図
第６図
第７図FIG. 1 is a flowchart showing an embodiment of the invention, and FIG.
The figure is an overall configuration diagram showing an image processing device to which the present invention can be applied, FIG. 3 is a block diagram showing details of the image processing section, and FIG.
The figure is an explanatory diagram for explaining the relationship between the light distribution binary image and the window, Figure 5 is an explanatory diagram for explaining the method of extracting position data, and the sixth figure is the light distribution deviation amount (f-explanation). FIG. 7 is the ninth explanatory diagram for explaining the maximum luminous intensity position data. Symbol explanation 1...Illuminator, 2...Screen, 3...TV camera, 4... - Image processing unit, 5... Light distribution (light distribution), 4A... A/D conversion unit, 4B... Window generation unit, 4C... Position data extraction unit, 4D... Memory, 4E...Processor (CPU), 4F...1/
10 Interface chair section, 4G...Monitor TV, 4H
...keyboard, 4I...printer, 10...window, 15...light distribution binary image, 20...window center line, 21...light distribution center, 24...standard arrangement Light curve, 26... Measured light distribution curve, 27... Maximum light intensity position, 28... Light distribution image near maximum light intensity. Agent Patent Attorney Akio Namiki Agent Patent Attorney Kiyoshi Matsuzaki Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 Figure 6 Figure 7
Claims (1)
配光）状態を撮像装置により撮像し、その撮像信号を所
定の光度レベルおよび最大光度近傍レベルでそれぞれ２
値化して少なくとも２種類の配光２値化画像を抽出し、
前者の配光２値化画像については、基準となる配光曲線
に沿う複数の位置データ検出用ウィンドウを発生させて
配光位置データを抽出し、該位置データから配光の外形
形状を演算して基準配光曲線からのずれ量を求め、後者
の配光２値化画像についてはその重心で表わされる最大
光度位置を演算してその基準位置からのずれ量を求め、
各ずれ量をそれぞれの設定値と比較して照明器の配光特
性を検査することを特徴とする照明器の配光特性検査方
法。Distribution of light emitted from the illuminator projected onto the screen (
The state of light distribution) is imaged by an imaging device, and the imaged signal is captured at a predetermined luminous intensity level and at a level near the maximum luminous intensity, respectively.
digitize and extract at least two types of light distribution binary images,
For the former binary light distribution image, multiple position data detection windows are generated along the reference light distribution curve, light distribution position data is extracted, and the external shape of the light distribution is calculated from the position data. For the latter light distribution binarized image, calculate the maximum luminous intensity position represented by its center of gravity to find the deviation from the reference position.
A method for inspecting light distribution characteristics of an illuminator, which comprises inspecting the light distribution characteristics of the illuminator by comparing each shift amount with each set value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61313369A JPS63168530A (en) | 1986-12-29 | 1986-12-29 | Inspection of light distribution characteristic for lighting apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61313369A JPS63168530A (en) | 1986-12-29 | 1986-12-29 | Inspection of light distribution characteristic for lighting apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63168530A true JPS63168530A (en) | 1988-07-12 |
Family
ID=18040429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61313369A Pending JPS63168530A (en) | 1986-12-29 | 1986-12-29 | Inspection of light distribution characteristic for lighting apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63168530A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0273129A (en) * | 1988-09-09 | 1990-03-13 | Fuji Electric Co Ltd | Device for measuring light distribution of head lamp for automobile or the like |
-
1986
- 1986-12-29 JP JP61313369A patent/JPS63168530A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0273129A (en) * | 1988-09-09 | 1990-03-13 | Fuji Electric Co Ltd | Device for measuring light distribution of head lamp for automobile or the like |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0413817B1 (en) | Substrate examining apparatus | |
| CN112184689B (en) | Semiconductor device detection method and device, intelligent terminal and storage medium | |
| JPH07113966B2 (en) | Two-dimensional image processing method and apparatus | |
| WO2017014518A1 (en) | Inspection system and inspection method | |
| JP2795044B2 (en) | Lighting method and image processing method for image processing inspection of crimp terminal | |
| JPS63168530A (en) | Inspection of light distribution characteristic for lighting apparatus | |
| JP4581424B2 (en) | Appearance inspection method and image processing apparatus | |
| JP2782759B2 (en) | Solder appearance inspection device | |
| JPH0814824A (en) | Correction method for measurement object displacement with speckle pattern using laser beam, and device therefor | |
| EP0370527B1 (en) | Method of and apparatus for inspecting substrate | |
| JPH02213711A (en) | Parts inspecting device | |
| JP2000097882A (en) | Method and device for x-ray inspection | |
| JPH02216408A (en) | Substrate inspection device | |
| JPS63113339A (en) | Main optical axis inspection of head lamp | |
| JP3203607B2 (en) | Screen defect detection device | |
| CN216847517U (en) | Defect detecting device | |
| JPS62113050A (en) | Bottle mouth inspection system | |
| WO2023233973A1 (en) | Inspection device | |
| JP3038718B2 (en) | Method and apparatus for inspecting solder bridge of lead component | |
| JPH044000A (en) | Method and device for inspecting printed board | |
| JPH07113620A (en) | Appearance inspection system for soldered part | |
| JPH05332746A (en) | Recognizing device of solder paste form | |
| JPH03189544A (en) | Substrate inspecting device | |
| JPH0241578A (en) | Chip parts check device | |
| JPH03175309A (en) | Testing apparatus for state of curved face |