JPS63168443U - - Google Patents

Info

Publication number
JPS63168443U
JPS63168443U JP1987059996U JP5999687U JPS63168443U JP S63168443 U JPS63168443 U JP S63168443U JP 1987059996 U JP1987059996 U JP 1987059996U JP 5999687 U JP5999687 U JP 5999687U JP S63168443 U JPS63168443 U JP S63168443U
Authority
JP
Japan
Prior art keywords
photomask
forming layer
mirror
light source
source side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987059996U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987059996U priority Critical patent/JPS63168443U/ja
Publication of JPS63168443U publication Critical patent/JPS63168443U/ja
Pending legal-status Critical Current

Links

JP1987059996U 1987-04-20 1987-04-20 Pending JPS63168443U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987059996U JPS63168443U (enrdf_load_html_response) 1987-04-20 1987-04-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987059996U JPS63168443U (enrdf_load_html_response) 1987-04-20 1987-04-20

Publications (1)

Publication Number Publication Date
JPS63168443U true JPS63168443U (enrdf_load_html_response) 1988-11-02

Family

ID=30892014

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987059996U Pending JPS63168443U (enrdf_load_html_response) 1987-04-20 1987-04-20

Country Status (1)

Country Link
JP (1) JPS63168443U (enrdf_load_html_response)

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