JPS6316832U - - Google Patents

Info

Publication number
JPS6316832U
JPS6316832U JP10797586U JP10797586U JPS6316832U JP S6316832 U JPS6316832 U JP S6316832U JP 10797586 U JP10797586 U JP 10797586U JP 10797586 U JP10797586 U JP 10797586U JP S6316832 U JPS6316832 U JP S6316832U
Authority
JP
Japan
Prior art keywords
vacuum
evacuation
valve
vacuum processing
processing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10797586U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0532186Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986107975U priority Critical patent/JPH0532186Y2/ja
Publication of JPS6316832U publication Critical patent/JPS6316832U/ja
Application granted granted Critical
Publication of JPH0532186Y2 publication Critical patent/JPH0532186Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1986107975U 1986-07-16 1986-07-16 Expired - Lifetime JPH0532186Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986107975U JPH0532186Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-07-16 1986-07-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986107975U JPH0532186Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-07-16 1986-07-16

Publications (2)

Publication Number Publication Date
JPS6316832U true JPS6316832U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-02-04
JPH0532186Y2 JPH0532186Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-18

Family

ID=30984740

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986107975U Expired - Lifetime JPH0532186Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-07-16 1986-07-16

Country Status (1)

Country Link
JP (1) JPH0532186Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55116432A (en) * 1979-03-02 1980-09-08 Anelva Corp Vacuum apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55116432A (en) * 1979-03-02 1980-09-08 Anelva Corp Vacuum apparatus

Also Published As

Publication number Publication date
JPH0532186Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-18

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