JPS63168310A - Vertical type slicer - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention particularly relates to a vertical slicer for cutting semiconductor ingots to produce wafers.

[Prior Art] - Generally, a small and inexpensive vertical slicer is used as a slicer for semiconductor ingots.

Figure 4 is a diagram of a conventional vertical slicer, where 1 is a cover, 2 is an inner peripheral blade, 3 is a semiconductor ingot, 4 is a pasting jig, 5 is an in, 1 is a pot box, 6 is a screw, and 7 is the handle. In this vertical slicer, a rotation axis for rotating an inner circumferential blade 2 for cutting an ingot 3 is vertically installed ii2, and an ingot box 5 equipped with a pasting jig 4 has the axis of the pasting jig 4 aligned with the vertical axis. It is provided to have a predetermined swing angle (θ) with respect to the rotation axis, and further has a predetermined mounting angle (φ) with respect to the axis of the pasting jig 4.
The ingot box 5 is moved in the horizontal direction by rotating the screw 6, and the ingot 3 is sent out in the axial direction of the pasting jig 4 to cut the ingot 3. This method has the advantage that the ingot 3 can be cut into wafers with a large area compared to the thickness of the ingot 3.

[Problems to be Solved by the Invention] However, when using this vertical slicer, each time the ingot 3 is cut and one piece is obtained, the dimensions are changed in the feeding direction of the ingot 3 and in the horizontal direction B. As changes occur, ingot 3 becomes cover 1 after several cutting operations.
There is a risk of collision with the end 1a of the Therefore, it is necessary to move the ingot 3 in the direction B by turning the handle 7 and using the screw 6 every several cutting operations, which poses a problem in that the cutting operation becomes intermittent.

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems and provide a vertical slicer that can continuously cut an ingot.

[Means for Solving the Problem 1] The above object is such that the rotating shaft for rotating the inner circumferential blade that cuts the ingot is installed vertically, and the ingot box equipped with the pasting jig is aligned with the axis of the pasting jig. is provided to have a predetermined swing angle (θ) with respect to the rotation axis,
Furthermore, a predetermined mounting angle (φ
) to which an Ichiki ingot is attached, and the ingot box is moved in the horizontal direction by a screw, and the ingot is sent out in the direction of the axis of the pasting jig to cut the ingot. The slicer is provided with a motor that rotates the screw, a switch that sets the cutting thickness of the ingot, the swing angle (θ), and the mounting angle (φ), respectively, and a motor that rotates the screw based on the settings. This is achieved by providing an arithmetic processing device that rotates the .

[Function] In the present invention, a motor is provided to rotate a screw that moves the ingot box in the horizontal direction, and the axis of the sticking jig for attaching the ingot to the ingot box is aligned with the vertically installed inner periphery. The cutting thickness of the ingot that is attached at a predetermined swing angle (θ) with respect to the rotation axis of the blade and a predetermined attachment angle (φ) with respect to the axis of the pasting jig. and a switch for respectively setting the swing angle (θ) and the mounting angle (φ), and a processing unit that rotates the motor based on the settings, and performs the cutting operation of the ingot. It can be performed continuously.

[Example] Hereinafter, an example of the vertical slicer of the present invention will be described based on the drawings. FIG. 1 is an overall structural diagram of a vertical slicer according to an embodiment of the present invention, FIG. 2 is an overall perspective view, and FIG. 3 is an explanatory diagram of the operation, showing the same parts as the conventional FIG. 4, or
Parts that act in the same way are given the same reference numerals, 8 is the step motor, 9 is the cylinder, 10 is the control 1!111
11 is a reducer, 12 is a reed switch, 13 is a limit switch, 14 is an optical fiber type sensor, 15 is a solenoid valve,
16 is a driver, 17 is a microcomputer unit, 18 is a mounting angle (φ) setting switch, 19 is a swinging angle (θ) setting switch, and 20 is an ingot cutting (thickness INDEX) setting switch. The present invention differs from conventional vertical slicers in that a step motor 8 that rotates a screw 6 is provided together with a reducer 11, and the cutting thickness of the ingot 3 (INDEX), a predetermined swing angle (θ), and a predetermined Ingot cutting thickness IND to set the mounting angle (φ) and
EX) setting switch 20, swing angle (θ) setting switch 19, and mounting angle (φ) setting switch 18,
Also, based on these settings, the step motor 8
It is equipped with a microcomputer unit 17, which is an arithmetic processing device for rotating and operating the microcomputer unit 17.

That is, in this embodiment, the microcomputer unit 17
, and respective setting switches 18, 20, and a driver for a predetermined installation angle (φ) of the ingot, a predetermined swing angle (θ) of the ingot box, a cutting thickness of the ingot (INDEX), etc. 16 constitutes a control panel 10, and this control tll110 drives the cylinder 9 via the step motor 8 and the solenoid valve 15. Further, a reed switch 32 is attached to the cylinder 9 to detect whether the cylinder 9 is released or fixed.

That is, the adjustment operation of the cutting point is not performed unless the released state is confirmed, and the operation to cut the ingot 3 is not performed unless the fixed state is confirmed. Furthermore, the optical fiber set sensor 14 prevents accidents such as the ingot 3 colliding with the cover 1 or the inner peripheral blade 2 during the adjustment operation of the cutting point.

Next, the operation will be explained with reference to FIG. As shown within the broken line in the figure, the slicer cuts the ingot 3 vertically to produce one wafer, and after returning to the original position, the ingot box 5 is rotated by the step motor 8 by the calculated feed amount. The ingot box 5 is moved in 13 directions by the ingot box 5, and then the cylinder 9 is fixed again to fix the ingot box 5. At this time, the main body of the slider is being fed in the direction. After these two operations are completed, the process begins to manufacture wafers from which the ingot 3 is cut. Thereafter, such operations are repeated, and wafers are continuously manufactured without human intervention.

[Effects of the Invention] As explained above, according to the vertical liner of the present invention, when cutting and manufacturing wafers with a large cross-sectional area from an ingot, the wafers can be efficiently manufactured by continuous cutting operations. It is possible to achieve this beneficial effect.

[Brief explanation of the drawing]

Fig. 1 is an overall structural diagram of a vertical slicer according to an embodiment of the present invention, Fig. 2 is an overall perspective view, Fig. 3 is an operational explanatory diagram, and Fig. 4 is a structural diagram of a conventional vertical slicer. be. 1: Cover, 2: Inner peripheral blade, 3: Ingot, 4: Pasting jig, 5: Ingot box, 6: Screw, 8 step motor, 10: Control board, 14: Optical fiber set sensor, 17: Microcomputer unit. % 3 mouths

Claims (1)

[Claims] (1) A rotating shaft for rotating an inner circumferential blade that cuts an ingot is installed vertically, and an ingot box equipped with a pasting jig is arranged such that the axis of the pasting jig is oriented at a predetermined swing angle ( θ), and the ingot is attached at a predetermined attachment angle (φ) with respect to the axis of the pasting jig, and the ingot box is moved horizontally by a screw. The vertical slicer also feeds the ingot in the axial direction of the pasting jig to cut the ingot. ) and the mounting angle (φ), and a processing unit that rotates the motor based on the settings.