JPS63167730U - - Google Patents
Info
- Publication number
- JPS63167730U JPS63167730U JP6097887U JP6097887U JPS63167730U JP S63167730 U JPS63167730 U JP S63167730U JP 6097887 U JP6097887 U JP 6097887U JP 6097887 U JP6097887 U JP 6097887U JP S63167730 U JPS63167730 U JP S63167730U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- liquid
- semiconductor wafer
- temperature control
- supply tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 18
- 239000007788 liquid Substances 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6097887U JPS63167730U (id) | 1987-04-22 | 1987-04-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6097887U JPS63167730U (id) | 1987-04-22 | 1987-04-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63167730U true JPS63167730U (id) | 1988-11-01 |
Family
ID=30893888
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6097887U Pending JPS63167730U (id) | 1987-04-22 | 1987-04-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63167730U (id) |
-
1987
- 1987-04-22 JP JP6097887U patent/JPS63167730U/ja active Pending