JPS63167281U - - Google Patents
Info
- Publication number
- JPS63167281U JPS63167281U JP6052987U JP6052987U JPS63167281U JP S63167281 U JPS63167281 U JP S63167281U JP 6052987 U JP6052987 U JP 6052987U JP 6052987 U JP6052987 U JP 6052987U JP S63167281 U JPS63167281 U JP S63167281U
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- parallel
- deflection device
- deflects
- deflection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6052987U JPS63167281U (en, 2012) | 1987-04-21 | 1987-04-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6052987U JPS63167281U (en, 2012) | 1987-04-21 | 1987-04-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63167281U true JPS63167281U (en, 2012) | 1988-10-31 |
Family
ID=30893018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6052987U Pending JPS63167281U (en, 2012) | 1987-04-21 | 1987-04-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63167281U (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1110525A (ja) * | 1997-06-17 | 1999-01-19 | Ebara Corp | ポリッシング装置 |
-
1987
- 1987-04-21 JP JP6052987U patent/JPS63167281U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1110525A (ja) * | 1997-06-17 | 1999-01-19 | Ebara Corp | ポリッシング装置 |
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