JPS63164227U - - Google Patents

Info

Publication number
JPS63164227U
JPS63164227U JP5599887U JP5599887U JPS63164227U JP S63164227 U JPS63164227 U JP S63164227U JP 5599887 U JP5599887 U JP 5599887U JP 5599887 U JP5599887 U JP 5599887U JP S63164227 U JPS63164227 U JP S63164227U
Authority
JP
Japan
Prior art keywords
wafer
frame
top wall
plate
sampling inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5599887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5599887U priority Critical patent/JPS63164227U/ja
Publication of JPS63164227U publication Critical patent/JPS63164227U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
  • Warehouses Or Storage Devices (AREA)
JP5599887U 1987-04-15 1987-04-15 Pending JPS63164227U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5599887U JPS63164227U (enrdf_load_stackoverflow) 1987-04-15 1987-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5599887U JPS63164227U (enrdf_load_stackoverflow) 1987-04-15 1987-04-15

Publications (1)

Publication Number Publication Date
JPS63164227U true JPS63164227U (enrdf_load_stackoverflow) 1988-10-26

Family

ID=30884415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5599887U Pending JPS63164227U (enrdf_load_stackoverflow) 1987-04-15 1987-04-15

Country Status (1)

Country Link
JP (1) JPS63164227U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007273643A (ja) * 2006-03-30 2007-10-18 Phyzchemix Corp ウエハカセット及びウエハ収容方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58213438A (ja) * 1982-05-24 1983-12-12 バリアン・アソシエイツ・インコ−ポレイテツド ウエ−ハ移送装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58213438A (ja) * 1982-05-24 1983-12-12 バリアン・アソシエイツ・インコ−ポレイテツド ウエ−ハ移送装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007273643A (ja) * 2006-03-30 2007-10-18 Phyzchemix Corp ウエハカセット及びウエハ収容方法

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