JPS63164227U

JPS63164227U -

Info

Publication number: JPS63164227U
Application number: JP5599887U
Authority: JP
Priority date: 1987-04-15
Filing date: 1987-04-15
Publication date: 1988-10-26

Description

[Brief explanation of the drawing]

第１図は本考案によるウエハ抜き取り検査装置
の端面図である。第２図は第１図の装置の頂面図
である。第３図は第１，２図に示す装置の正面図
である。図において、１０……フレーム、１２，１４…
…側壁、１６……頂壁、１８……開口、２０……
開口、２２……側板、２４，２６……スロツト、
３０……ウエハ押し上げ手段、３２……シヤシ、
３４……ラツク、３６……ピニオン軸、４０……
支え、４２……押し上げプレート、４４……スロ
ツト、４６……レバー、５０……ウエハ、５２…
…キヤリヤ、５４……ストツパ、５６……ノブ、
５８……キヤリヤストツパ、６０……ピツチゲー
ジ。 FIG. 1 is an end view of a wafer sampling inspection apparatus according to the present invention. 2 is a top view of the apparatus of FIG. 1; FIG. FIG. 3 is a front view of the apparatus shown in FIGS. 1 and 2. In the figure, 10...frame, 12, 14...
...Side wall, 16...Top wall, 18...Opening, 20...
Opening, 22... side plate, 24, 26... slot,
30... Wafer pushing means, 32... Chassis,
34...Rack, 36...Pinion shaft, 40...
Support, 42... Push-up plate, 44... Slot, 46... Lever, 50... Wafer, 52...
...Carrier, 54...Stoppa, 56...Knob,
58...Carrier stop, 60...Pitch gauge.

Claims

[Claims for Utility Model Registration] (1) Opposing parallel side walls and the top edges of these side walls are connected to each other, forming a space extending in the longitudinal direction together with the side walls, and further having an elongated opening extending in the longitudinal direction. The wafer carrier includes a frame having a flat top wall with a flat top wall, on which a wafer carrier can be set, and a wafer lifting means installed in the space of the frame. , a chassis fixed to said frame, a rack means attached to said chassis extending parallel to said elongated opening in said top wall, and a rack means engaged with said rack means and attached to one of the side walls of said frame; a shaft having one end projecting outwardly through a longitudinal slot provided therein and an opposite end slidably mounted in another similar elongated slot provided in said chassis in alignment with said slot; a pitch feed dial fixed to an externally protruding end of said shaft portion of said pinion means; a push-up plate attached to the shaft portion of the pinion means, the push-up plate having an upper end capable of engaging with the peripheral edge of the wafer; and a lever connected to the push-up plate and capable of lifting the push-up plate. A wafer sampling inspection device comprising means. (2) Utility Model Registration In the wafer sampling inspection apparatus according to claim 1, the wafer lifting means includes a releasable stopper, and by releasing the stopper, the lifting plate and the pinion means are moved rapidly. A wafer sampling inspection device characterized by being able to perform (3) Utility Model Registration In the wafer sampling inspection apparatus according to claim 1, at least the top wall of the frame is inclined, so that the wafer in the carrier placed on the upper surface of the top wall can be set at an angle. A wafer sampling inspection device characterized by: