JPS63164227U - - Google Patents
Info
- Publication number
- JPS63164227U JPS63164227U JP5599887U JP5599887U JPS63164227U JP S63164227 U JPS63164227 U JP S63164227U JP 5599887 U JP5599887 U JP 5599887U JP 5599887 U JP5599887 U JP 5599887U JP S63164227 U JPS63164227 U JP S63164227U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- frame
- top wall
- plate
- sampling inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 6
- 238000005070 sampling Methods 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5599887U JPS63164227U (cs) | 1987-04-15 | 1987-04-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5599887U JPS63164227U (cs) | 1987-04-15 | 1987-04-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63164227U true JPS63164227U (cs) | 1988-10-26 |
Family
ID=30884415
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5599887U Pending JPS63164227U (cs) | 1987-04-15 | 1987-04-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63164227U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007273643A (ja) * | 2006-03-30 | 2007-10-18 | Phyzchemix Corp | ウエハカセット及びウエハ収容方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58213438A (ja) * | 1982-05-24 | 1983-12-12 | バリアン・アソシエイツ・インコ−ポレイテツド | ウエ−ハ移送装置 |
-
1987
- 1987-04-15 JP JP5599887U patent/JPS63164227U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58213438A (ja) * | 1982-05-24 | 1983-12-12 | バリアン・アソシエイツ・インコ−ポレイテツド | ウエ−ハ移送装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007273643A (ja) * | 2006-03-30 | 2007-10-18 | Phyzchemix Corp | ウエハカセット及びウエハ収容方法 |
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