JPS63164220U - - Google Patents
Info
- Publication number
- JPS63164220U JPS63164220U JP5713787U JP5713787U JPS63164220U JP S63164220 U JPS63164220 U JP S63164220U JP 5713787 U JP5713787 U JP 5713787U JP 5713787 U JP5713787 U JP 5713787U JP S63164220 U JPS63164220 U JP S63164220U
- Authority
- JP
- Japan
- Prior art keywords
- cvd apparatus
- wafer
- hot plate
- heat source
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5713787U JPS63164220U (ru) | 1987-04-15 | 1987-04-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5713787U JPS63164220U (ru) | 1987-04-15 | 1987-04-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63164220U true JPS63164220U (ru) | 1988-10-26 |
Family
ID=30886569
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5713787U Pending JPS63164220U (ru) | 1987-04-15 | 1987-04-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63164220U (ru) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019102523A1 (ja) * | 2017-11-21 | 2019-05-31 | 佐伯 午郎 | 拡散装置 |
-
1987
- 1987-04-15 JP JP5713787U patent/JPS63164220U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019102523A1 (ja) * | 2017-11-21 | 2019-05-31 | 佐伯 午郎 | 拡散装置 |