JPS63164217U - - Google Patents

Info

Publication number
JPS63164217U
JPS63164217U JP5761487U JP5761487U JPS63164217U JP S63164217 U JPS63164217 U JP S63164217U JP 5761487 U JP5761487 U JP 5761487U JP 5761487 U JP5761487 U JP 5761487U JP S63164217 U JPS63164217 U JP S63164217U
Authority
JP
Japan
Prior art keywords
rotating shaft
container
motor
chuck
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5761487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5761487U priority Critical patent/JPS63164217U/ja
Publication of JPS63164217U publication Critical patent/JPS63164217U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP5761487U 1987-04-16 1987-04-16 Pending JPS63164217U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5761487U JPS63164217U (US20090163788A1-20090625-C00002.png) 1987-04-16 1987-04-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5761487U JPS63164217U (US20090163788A1-20090625-C00002.png) 1987-04-16 1987-04-16

Publications (1)

Publication Number Publication Date
JPS63164217U true JPS63164217U (US20090163788A1-20090625-C00002.png) 1988-10-26

Family

ID=30887485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5761487U Pending JPS63164217U (US20090163788A1-20090625-C00002.png) 1987-04-16 1987-04-16

Country Status (1)

Country Link
JP (1) JPS63164217U (US20090163788A1-20090625-C00002.png)

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