JPS63162861U - - Google Patents
Info
- Publication number
- JPS63162861U JPS63162861U JP5445187U JP5445187U JPS63162861U JP S63162861 U JPS63162861 U JP S63162861U JP 5445187 U JP5445187 U JP 5445187U JP 5445187 U JP5445187 U JP 5445187U JP S63162861 U JPS63162861 U JP S63162861U
- Authority
- JP
- Japan
- Prior art keywords
- processed
- substrate
- concave mirror
- heater
- facing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 2
- 229910052753 mercury Inorganic materials 0.000 claims description 2
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 239000010408 film Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5445187U JPS63162861U (enExample) | 1987-04-10 | 1987-04-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5445187U JPS63162861U (enExample) | 1987-04-10 | 1987-04-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63162861U true JPS63162861U (enExample) | 1988-10-24 |
Family
ID=30881458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5445187U Pending JPS63162861U (enExample) | 1987-04-10 | 1987-04-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63162861U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61247021A (ja) * | 1985-04-24 | 1986-11-04 | Nec Corp | 光ｃｖｄ装置 |
-
1987
- 1987-04-10 JP JP5445187U patent/JPS63162861U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61247021A (ja) * | 1985-04-24 | 1986-11-04 | Nec Corp | 光ｃｖｄ装置 |
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